First study of humidity sensors based on nanostructured carbon films produced by supersonic cluster beam deposition

Sensors and Actuators, B: Chemical

Volumn 100, Issue 1-2, 2004, Pages 173-176

  Bruzzi, M ^a   Miglio, S ^a   Scaringella, M ^a   Bongiorno, G ^a   Piseri, P ^a   Podesta, A ^a   Milani, P ^a  

^a INFM   (Italy)

Author keywords

Humidity sensors; Nanostructured carbon; Supersonic cluster beam deposition

Indexed keywords

ATMOSPHERIC HUMIDITY; CAPACITANCE; CURRENT VOLTAGE CHARACTERISTICS; DIELECTRIC MATERIALS; ELECTRIC CONDUCTIVITY; HYGROMETERS; LASER ABLATION; PLASMAS; POLYMERS; POROUS MATERIALS; RESISTORS; SENSORS;

HUMIDITY SENSORS; METAL OXIDE SENSORS; NANOSTRUCTURED CARBON; SUPERSONIC CLUSTER BEAM DEPOSITION;

CARBON NANOTUBES;

EID: 2342488068     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2003.12.046     Document Type: Article

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