Principle of apertureless scanning near-field optical microscopy: On the way to the optical metrology of nanostructures

Journal of the Korean Physical Society

Volumn 47, Issue SUPPL. 1, 2005, Pages

  Barchiesi, Dominique ^a   Grimault, Anne Sophie ^a   Grosges, Thomas ^a   Macías, Demetrio ^a   Vial, Alexandre ^a  

^a UNIVERSITÉ DE TECHNOLOGIE DE TROYES   (France)

Author keywords

Classical electromagnetism; Diffraction; Finite difference time domain; Finite element method; Inverse problem; Maxwell's equations; Metrology; Near field; Numerical modeling; Scattering

Indexed keywords

EID: 25144459157     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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