On the relationship of semiconductor yield and reliability

IEEE Transactions on Semiconductor Manufacturing

Volumn 18, Issue 3, 2005, Pages 422-429

  Kim, Kyungmee O ^a   Zuo, Ming J ^b   Kuo, Way ^c  

^a Konkuk University   (South Korea)

^b UNIVERSITY OF ALBERTA   (Canada)

^c UNIVERSITY OF TENNESSEE   (United States)

Author keywords

Conditional reliability; Defect density distribution; Nonfatal defects; Scaling factor

Indexed keywords

CRYSTAL DEFECTS; RELIABILITY; SEMICONDUCTOR DEVICES; STRESS ANALYSIS;

CONDITIONAL RELIABILITY; DEFECT DENSITY DISTRIBUTION; NONFATAL DEFECTS; SCALING FACTOR;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 25144454377     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2005.852110     Document Type: Article

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