Wafer scale micro-optics replication technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5183, Issue , 2003, Pages 148-154

  Rossi, Markus ^a   Rudmann, Hartmut ^a   Marty, Brigitte ^a   Maciossek, Andreas ^a  

^a Heptagon Oy   (Switzerland)

Author keywords

Micro optical elements; Optical microsystems; Replication

Indexed keywords

COST EFFECTIVENESS; DIFFRACTIVE OPTICS; ETCHING; IMAGE SENSORS; INJECTION MOLDING; LIGHT EMITTING DIODES; LITHOGRAPHY; OPTIMIZATION; ULTRAVIOLET RADIATION;

MICRO-OPTICAL ELEMENTS; OPTICAL MICROSYSTEMS; REPLICATION; UV-EMBOSSING;

MICROOPTICS;

EID: 2342653605     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.507769     Document Type: Conference Paper

References (3)

1. Markus Rossi, Ilkka Kallioniemi, "Micro-optical modules fabricated by high-precision replication processes", in OSA TOPS Vol. 75 (2002) 108.
2. Thomas Ammer. Markus Rossi, and Michael T. Gale, "On-chip replication of micro-optical structures for VCSEL to fiber coupling", in Proc. SPIE Vol. 440 (2001) 238.
3. Samuel Obi, Michael T. Gale, Andreas Kuoni, Wilfried Noell, and Nico de Rooij, "Fabrication of optical MEMS in Sol-Gel materials", Proc. IEEE/LEOS Optical MEMS 2002, 20-23 August 2002, Lugano, Switzerland, IEEE Cat. No. 02EX610 (2002) 39.