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Volumn 3, Issue 3-4, 2004, Pages 337-340

Modeling of FinFET: 3D MC simulation using FMM and unintentional doping effects on device operation

Author keywords

3D Monte Carlo; FinFET; FMM; Unintentional doping

Indexed keywords


EID: 24944534607     PISSN: 15698025     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10825-004-7072-7     Document Type: Article
Times cited : (19)

References (10)
  • 4
    • 84886447996 scopus 로고    scopus 로고
    • "Self-aligned (top and bottom) double-gate MOSFET with a 25 nm thick silicon channel"
    • H.S. Wong, K. Chan, and Y. Taur, "Self-aligned (top and bottom) double-gate MOSFET with a 25 nm thick silicon channel" IEDM Tech. Dig, 427 (1997).
    • (1997) IEDM Tech. Dig. , pp. 427
    • Wong, H.S.1    Chan, K.2    Taur, Y.3
  • 8
    • 35949025517 scopus 로고
    • "The Monte Carlo method for the solution of charge transport in semiconductors with applications to covalent materials"
    • 10.1103/RevModPhys.55.645
    • C. Jacoboni and L. Reggiani, "The Monte Carlo method for the solution of charge transport in semiconductors with applications to covalent materials," Rev. Modern Phys., 55, 645 (1983). 10.1103/ RevModPhys.55.645
    • (1983) Rev. Modern Phys. , vol.55 , pp. 645
    • Jacoboni, C.1    Reggiani, L.2
  • 9
    • 0000362580 scopus 로고    scopus 로고
    • "A fast adaptive multipole algorithm in three dimensions"
    • 10.1006/jcph.1999.6355
    • H. Cheng, L. Greengard, and V. Rokhlin, "A fast adaptive multipole algorithm in three dimensions" Journal of Computational Physics, 155, 468 (1999). 10.1006/jcph.1999.6355
    • (1999) Journal of Computational Physics , vol.155 , pp. 468
    • Cheng, H.1    Greengard, L.2    Rokhlin, V.3
  • 10
    • 24944481851 scopus 로고    scopus 로고
    • "FMMpart3D library file"
    • MadMAx Optics Inc
    • MadMAx Optics Inc, "FMMpart3D library file"


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.