SCOPUS 정보 검색 플랫폼

Volumn 87, Issue 11, 2005, Pages

Silicon layer transfer using plasma hydrogenation

Author keywords

[No Author keywords available]

Indexed keywords

CROSS-SECTION TRANSMISSION; PLASMA HYDROGENATION; SILICON LAYER TRANSFER; TRAPPING;

ANNEALING; HEAT TREATMENT; HYDROGEN; HYDROGENATION; PLASMA APPLICATIONS; SILICON WAFERS;

SILICON;

EID: 24944450712 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2048811 Document Type: Article

Times cited : (15)

References (14)

1
- 0029637854
- M. Bruel, Electron. Lett. 31, 1201 (1995).
- (1995) Electron. Lett. , vol.31 , pp. 1201
- Bruel, M.¹

2
- 0342727389
- M. K. Weldon, V. E. Marsico, Y. J. Chabal, A. Agarwal, D. J. Eaglesham, J. Sapjeta, W. L. Brown, D. C. Jacobson, Y. Caudano, S. B. Christman, and E. E. Chaban, J. Vac. Sci. Technol. B 15, 1065 (1997).
- (1997) J. Vac. Sci. Technol. B , vol.15 , pp. 1065
- Weldon, M.K.¹ Marsico, V.E.² Chabal, Y.J.³ Agarwal, A.⁴ Eaglesham, D.J.⁵ Sapjeta, J.⁶ Brown, W.L.⁷ Jacobson, D.C.⁸ Caudano, Y.⁹ Christman, S.B.¹⁰ Chaban, E.E.¹¹

3
- 0036697877
- A. Y. Usenko and A. G. Ulyashin, Jpn. J. Appl. Phys., Part 1 41, 5021 (2002).
- (2002) Jpn. J. Appl. Phys., Part 1 , vol.41 , pp. 5021
- Usenko, A.Y.¹ Ulyashin, A.G.²

4
- 0041465724
- A. Usenko, J. Electron. Mater. 32, 872 (2003).
- (2003) J. Electron. Mater. , vol.32 , pp. 872
- Usenko, A.¹

5
- 21044440249
- P. Chen, P. K. Chu, T. Höchbauer, M. Nastasi, D. Buca, S. Mantl, N. D. Theodore, T. L. Alford, J. W. Mayer, R. Loo, M. Caymax, M. Cai, and S. S. Lau, Appl. Phys. Lett. 85, 4944 (2004).
- (2004) Appl. Phys. Lett. , vol.85 , pp. 4944
- Chen, P.¹ Chu, P.K.² Höchbauer, T.³ Nastasi, M.⁴ Buca, D.⁵ Mantl, S.⁶ Theodore, N.D.⁷ Alford, T.L.⁸ Mayer, J.W.⁹ Loo, R.¹⁰ Caymax, M.¹¹ Cai, M.¹² Lau, S.S.¹³

6
- 20244374568
- P. Chen, P. K. Chu, T. Höchbauer, J.-K. Lee, M. Nastasi, D. Buca, S. Mantl, R. Loo, M. Caymax, T. Alford, J. W. Mayer, N. D. Theodore, M. Cai, B. Schmidt, and S. S. Lau, Appl. Phys. Lett. 86, 031904 (2005).
- (2005) Appl. Phys. Lett. , vol.86 , pp. 031904
- Chen, P.¹ Chu, P.K.² Höchbauer, T.³ Lee, J.-K.⁴ Nastasi, M.⁵ Buca, D.⁶ Mantl, S.⁷ Loo, R.⁸ Caymax, M.⁹ Alford, T.¹⁰ Mayer, J.W.¹¹ Theodore, N.D.¹² Cai, M.¹³ Schmidt, B.¹⁴ Lau, S.S.¹⁵

7
- 0038225410
- L. Korpas, J. W. Corbett, and S. K. Estreicher, Phys. Rev. B 46, 12365 (1992).
- (1992) Phys. Rev. B , vol.46 , pp. 12365
- Korpas, L.¹ Corbett, J.W.² Estreicher, S.K.³

8
- 0028416825
- S. J. Pearton, Mater. Sci. Eng., B 23, 130 (1994).
- (1994) Mater. Sci. Eng., B , vol.23 , pp. 130
- Pearton, S.J.¹

9
- 0030288186
- P. K. Chu, S. Qin, C. Chan, N. W. Cheung, and L. A. Larson, Mat. Sci. Engin. Reports 17, 207 (1996).
- (1996) Mat. Sci. Engin. Reports , vol.17 , pp. 207
- Chu, P.K.¹ Qin, S.² Chan, C.³ Cheung, N.W.⁴ Larson, L.A.⁵

10
- 0000968807
- P. K. Chu, B. Y. Tang, Y. C. Cheng, and P. K. Ko, Rev. Sci. Instrum. 68, 1866 (1997).
- (1997) Rev. Sci. Instrum. , vol.68 , pp. 1866
- Chu, P.K.¹ Tang, B.Y.² Cheng, Y.C.³ Ko, P.K.⁴

11
- 0003412161
- Pergamon, New York
- J. F. Ziegler, J. B. Biersack, and U. Littmark, The Stopping and Range of Ions in Solids (Pergamon, New York, 1985).
- (1985) The Stopping and Range of Ions in Solids
- Ziegler, J.F.¹ Biersack, J.B.² Littmark, U.³

12
- 0038581184
- J. G. Swadener and M. Nastasi, Nucl. Instrum. Methods Phys. Res. B 206, 937 (2003).
- (2003) Nucl. Instrum. Methods Phys. Res. B , vol.206 , pp. 937
- Swadener, J.G.¹ Nastasi, M.²

13
- 4444250221
- D. M. Follstaedt, J. A. Knapp, and S. M. Myers, J. Mater. Res. 19, 338 (2004).
- (2004) J. Mater. Res. , vol.19 , pp. 338
- Follstaedt, D.M.¹ Knapp, J.A.² Myers, S.M.³

14
- 84860068962
- T. Höchbauer, A. Misra, M. Nastasi, and J. W. Mayer, J. Appl. Phys. 92, 2335 (2002).
- (2002) J. Appl. Phys. , vol.92 , pp. 2335
- Höchbauer, T.¹ Misra, A.² Nastasi, M.³ Mayer, J.W.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.