Increasing the fracture toughness of silicon by ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 206, Issue , 2003, Pages 937-940

  Swadener, J G ^a   Nastasi, M ^a  

^a LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

Fracture mechanics; Implantation; Radiation effects; Silicon

Indexed keywords

ION BOMBARDMENT; ION IMPLANTATION; MICROCRACKS; RADIATION EFFECTS; SEMICONDUCTING SILICON;

PENETRATION DEPTHS;

FRACTURE TOUGHNESS;

EID: 0038581184     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(03)00865-6     Document Type: Conference Paper

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