A comparison of Ti/Pt and TiN/Pt electrodes used with ferroelectric SrBi2Ta2O9 films

Thin Solid Films

Volumn 406, Issue 1-2, 2002, Pages 23-29

  Watts, B E ^a   Leccabue, F ^a   Guerri, S ^a   Severi, M ^a   Fanciulli, M ^b   Ferrari, S ^b   Tallarida, G ^b   Morandi, C ^c  

^a CNR   (Italy)

^b LABORATORIO MDM   (Italy)

^c UNIVERSITY OF PARMA   (Italy)

Author keywords

Depth profiling; Ferroelectric thin film; Metal organic decomposition (MOD); Secondary ion mass spectrometry (SIMS); Strontium bismuth tantalate; Titanium nitride

Indexed keywords

ATOMIC FORCE MICROSCOPY; CAPACITORS; DIFFUSION; ELECTRODES; OXIDES; PLATINUM; POLARIZATION; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY; STRONTIUM COMPOUNDS; TITANIUM NITRIDE;

ELECTRODE MORPHOLOGY;

FERROELECTRIC THIN FILMS;

EID: 0037051248     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(01)01778-3     Document Type: Article

References (12)