Transition of MEMS technology to nanofabrication

Journal of Nanoscience and Nanotechnology

Volumn 5, Issue 6, 2005, Pages 864-868

  Luesebrink, Helge ^a   Glinsner, Thomas ^a   Jakeway, Stephen C ^b   Crabtree, H John ^b   Cameron, Neil S ^c   Roberge, Hélène ^c   Veres, Teodor ^c  

^a EV GROUP   (Austria)

^b Micralyne Inc   (Canada)

^c NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

Hot Embossing; MEMS; Micro Contact Printing; Microfluidics; UV Nanoimprint Lithography

Indexed keywords

MICRO CONTACT PRINTING; MICROFLUIDICS; UV-NANOIMPRINT LITHOGRAPHY;

LITHOGRAPHY; NANOTECHNOLOGY; PRINTING; ULTRAVIOLET RADIATION;

MICROELECTROMECHANICAL DEVICES;

EMBOSSING; HOT FORMING; IMPACT PRINTING; LITHOGRAPHY; ULTRAVIOLET RADIATION;

NANOMATERIAL;

ARTICLE; BIOMEDICAL TECHNOLOGY ASSESSMENT; CHEMISTRY; COMPARATIVE STUDY; ELECTRONICS; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; INSTRUMENTATION; MATERIALS TESTING; METHODOLOGY; MICROFLUIDIC ANALYSIS; NANOTECHNOLOGY; SURFACE PROPERTY; ULTRASTRUCTURE;

EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MATERIALS TESTING; MICROFLUIDIC ANALYTICAL TECHNIQUES; MINIATURIZATION; NANOSTRUCTURES; NANOTECHNOLOGY; SURFACE PROPERTIES; TECHNOLOGY ASSESSMENT, BIOMEDICAL;

EID: 24744457359     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2005.129     Document Type: Article

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