Femtosecond pulsed laser ablation of diamond-like carbon films on silicon

Applied Surface Science

Volumn 252, Issue 2, 2005, Pages 352-357

  Dong, Y ^a   Sakata, H ^b   Molian, P ^a  

^a Iowa State University   (United States)

^b TOKAI UNIVERSITY   (Japan)

Author keywords

Diamond like carbon; Laser

Indexed keywords

DIAMONDS; LASER ABLATION; METALLIC FILMS; NUMERICAL METHODS; PARAMETER ESTIMATION; SCANNING ELECTRON MICROSCOPY; SILICON;

ABLATION THRESHOLD; COLLATERAL THERMAL DAMAGES; DIAMOND-LIKE CARBON; FEMOSECOND PULSED LASER ABLATION;

DIAMOND LIKE CARBON FILMS;

EID: 24644505358     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.01.008     Document Type: Article

References (12)

1. P. Zhang, B.K. Tay, C.Q. Sun, and S.P. Lau J. Vac. Sci. Technol. A 20 4 2002 1390
2. B. Craig, Ultrafast pulses promise better processing of fine structures, Laser Focus World, September 1998, pp. 79-88.
3. D. Vouagner, Cs. Beleznai, J.P. Girardeau-Montaut, C. Templir, and H. Gonnord Diam. Relat. Mater. 9 2000 786
4. X. Liu, D. Du, and G. Mourou IEEE J. Quant. Electron. 33 1997 1706
5. J.M. Liu Opt. Lett. 7 1982 196
6. Y. Jee, M.F. Becker, and R.M. Walser J. Opt. Soc. Am. B 5 1988 648
7. J. Güdde, J. Hohlfeld, J.G. Müller, and E. Matthias Appl. Surf. Sci. 127-129 1998 40
8. Y. Dong, and P. Molian Appl. Phys. A 77 2003 839
9. J. Bonse, P. Rudolph, J. Krüger, S. Baudach, and W. Kautek Appl. Surf. Sci. 154-155 2000 659
10. S. Baudach, J. Bonse, J. Krüger, and W. Kautek Appl. Surf. Sci. 154-155 2000 555
11. N. Yasumaru, K. Miyazaki, and J. Kiuchi Appl. Phys. A 76 2003 983
12. N. Yasumaru, K. Miyazaki, and J. Kiuchi Appl. Phys. A 79 2004 425