New method to determine laser damage threshold for thin diamond-like carbon films on silicon

Diamond and Related Materials

Volumn 9, Issue 3, 2000, Pages 786-791

  Vouagner, D ^a   Beleznai, Cs ^a,b   Girardeau Montaut, J P ^a   Templier, C ^c   Gonnord, H ^c  

^a UNIVERSITÉ LYON 1   (France)

^b UNIVERSITY OF SZEGED   (Hungary)

^c UNIVERSITÉ DE POITIERS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

LASER ABLATION; NEODYMIUM LASERS; PHOTOEMISSION; PULSED LASER APPLICATIONS; RAMAN SPECTROSCOPY; SENSITIVITY ANALYSIS; SILICON; THIN FILMS;

DIAMOND-LIKE CARBON (DLC) FILMS; LASER-INDUCED PHOTOEMISSIONS;

AMORPHOUS FILMS;

EID: 0033737810     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00272-1     Document Type: Article

References (7)

1. V.Yu. Armeyev, N.I. Chapliev, V.I. Konov, V.G. Ralchenko, V.E. Strelnitsky, Yu.Ya. Volkov, Laser Surface Microprocessing, V.I. Konov et al. (Eds.), Proc. SPIE 1352 (1990) 200.
2. V.Yu. Armeyev, A.H. Arslanbekov, N.I. Chapliev, V.I. Konov, V.G. Ralchenko, V.E. Strelnitsky, Appl. Diamond Films Rel. Mat. 33 (1991) 799.
3. Cs. Beleznai, D. Vouagner, J.P. Girardeau-Montaut, Appl. Surf. Sci. 138-139 (1999) 6.
4. B. Dischler, A. Bubenzer, P. Koidl, Solid State Commun. 48 (1983) 105.
5. H. Tsai, D.B. Bogy, J. Vac. Sci. Technol. A 5 (6) (1987) 3287.
6. N. Wada, P.J. Gaczi, S.A. Solin, J. Non-Cryst. Solids 35-36 (1980) 543.
7. D. Vouagner, Cs. Beleznai, J. P. Girardeau-Montaut, C. Templier, H. Gonnord, presented at the E-MRS 99 Spring Meeting, Strasbourg, June 1-4, 1999.