Atomic nanofabrication: Perspectives for serial and parallel deposition

Journal of Physics: Conference Series

Volumn 19, Issue 1, 2005, Pages 118-124

  Meschede, Dieter ^a  

^a NONE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 24644504899     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/19/1/020     Document Type: Conference Paper

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