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Volumn 59, Issue 3, 1999, Pages 2476-2485

Minimizing feature width in atom optically fabricated chromium nanostructures

Author keywords

[No Author keywords available]

Indexed keywords

ATOM-LIGHT INTERACTION; CHROMIUM NANOSTRUCTURES; DIRECT-WRITE LITHOGRAPHY; LASER POWER;

EID: 0000270569     PISSN: 10502947     EISSN: 10941622     Source Type: Journal    
DOI: 10.1103/PhysRevA.59.2476     Document Type: Article
Times cited : (99)

References (34)
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    • Similar studies have been carried out for laser-focused sodium deposition; however, those results are not directly comparable to the present studies using chromium. See R. E. Behringer, V. Natarajan, and G. Timp, Opt. Lett. 22, 114 (1997)
    • (1997) Opt. Lett. , vol.22 , pp. 114
    • Behringer, R.E.1    Natarajan, V.2    Timp, G.3
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    • special issue on the mechanical effects of light
    • See, e.g., J. Opt. Soc. Am. B 2 (1985), special issue on the mechanical effects of light, edited by P. Meystre and S. Stenholm;
    • (1985) J. Opt. Soc. Am. B , vol.2
    • Meystre, P.1    Stenholm, S.2
  • 10
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    • special issue on laser cooling and trapping of atoms
    • ibid. 6 (1989), special issue on laser cooling and trapping of atoms, edited by S. Chu and C. Wieman;
    • (1989) J. Opt. Soc. Am. B , vol.6
    • Chu, S.1    Wieman, C.2
  • 16
    • 18444402516 scopus 로고    scopus 로고
    • note
    • The paraxial approximation applies when trajectories have small angles and travel close to the axis, i.e., when dy/dz ≪1 and ky≪1.
  • 18
    • 18444388033 scopus 로고    scopus 로고
    • note
    • In the experiments the temperature of the oven was different for different runs, ranging from 1800 to 1900 K, with an uncertainty of approximately 50 K. This amount of deviation has only a very minor effect on the outcome of the calculations.
  • 19
    • 18444406911 scopus 로고    scopus 로고
    • note
    • -2, from which the expression for the full-width at half maximum is derived.
  • 23
    • 18444397507 scopus 로고    scopus 로고
    • note
    • This has been verified by model calculations based on a two-level atom.
  • 27
    • 18444406619 scopus 로고    scopus 로고
    • note
    • A protective layer of PMMA (KTI Chemicals, Inc. 950K) was painted on the area of Cr that was not to be etched and cured at 100°C for 1 h. The sample was then dipped in a Cr etchant (Cyantek CR-7) for 60 s at 25°C and rinsed with distilled water. This left a step edge that had a transition width (10-90%) of 15 nm. N.B. certain commercial materials are identified in order to adequately specify the experimental procedure. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the materials identified are necessarily the best for the purpose.
  • 28
    • 18444361872 scopus 로고    scopus 로고
    • note
    • The AFM tips used were commercially available etched silicon tapping-mode tips with nominal specifications 35° cone angle and 10 nm radius. On examining these tips with our artifact, we observed a noteworthy behavior. Under our scan conditions on the Cr samples, the tips became slightly dulled after about 10 min of scanning, reaching a steady-state shape with 25 nm radius and 50° cone angle. This dulling behavior was quite reproducible with a number of tips examined, and the shape appeared to be quite constant after the initial dulling period. We used this dulled shape as our tip model for eroding the data.
  • 30
    • 18444402839 scopus 로고    scopus 로고
    • note
    • 2 images which are taken to be representative of the sample.
  • 31
    • 18444392761 scopus 로고    scopus 로고
    • note
    • Intensity values presented in this paper have an associated uncertainty of approximately 10%, resulting predominantly from uncertainty in the measurement of laser power.
  • 32
    • 0039672731 scopus 로고
    • Electronic Packaging Material Science III, edited by R. Jaccodine, K. A. Jackson, and R. C. Sundahl, Materials Research Society, Pittsburgh
    • D. Goyal, A. H. King, and J. C. Bilello, in Electronic Packaging Material Science III, edited by R. Jaccodine, K. A. Jackson, and R. C. Sundahl, MRS Symposia Proceedings No. 108 (Materials Research Society, Pittsburgh, 1988), p. 395.
    • (1988) MRS Symposia Proceedings No. 108 , vol.108 , pp. 395
    • Goyal, D.1    King, A.H.2    Bilello, J.C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.