A study on the energy distribution for grid-assisting magnetron sputtering

Surface and Coatings Technology

Volumn 200, Issue 1-4 SPEC. ISS., 2005, Pages 421-424

  Jung, Min J ^a   Chung, Yun M ^a   Houska, J ^b   Baroch, P ^b   Vlcek, J ^b   Musil, J ^b   Nam, K H ^a   Han, Jeon G ^a  

^a Sungkyunkwan University   (South Korea)

^b UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Grid; Ion bombardment; Magnetron sputtering; Roughness; Titanium

Indexed keywords

COATINGS; ION BOMBARDMENT; METALLIC FILMS; SPUTTER DEPOSITION; STRUCTURE (COMPOSITION); SURFACE ROUGHNESS; TITANIUM; TRANSMISSION ELECTRON MICROSCOPY; TRANSPORT PROPERTIES;

ATOM MOBILITY; CONVENTIONAL MAGNETRON SPUTTERING; ENERGY DISTRIBUTION; GRID-ASSISTING MAGNETRON SPUTTERING; TITANIUM COATING;

MAGNETRON SPUTTERING;

SPUTTERING;

EID: 24644490785     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2005.03.005     Document Type: Article

References (10)

1. A.P. Ehiasarian R. New W.-D. Munz L. Hultman U. Helmersson V. Kouznetsov Vacuum 65 2002 147
2. T. Lindstrom J. Isidorsson G.A. Niklasson Thin Solid Films 401 2001 165
3. L.C. Fontana J.L.R. Munzart Surf. Coat. Technol. 107 1998 24
4. L. Hultman U. Helmersson S.A. Barnett J. Appl. Phys. 61 2 1987 552
5. J.J. Cuomo S.M. Rossnagel Handbook of Ion Beam Processing Technology 1989 Noyes Publications
6. M. Misina Leonid R. Shaginyan M. Macek P. Panja Surf. Coat. Technol. 142-144 2001 348
7. Ian G. Brown The Physics and Technology of Ion Source 1987 John Wiley & Sons USA
8. C. Gautier G. Moulard J.P. Chatelon G. Motyl Thin Solid Film 382 2001 102
9. K.-H. Muller Phys. Rev., B 35 1987 7906
10. J. Musil J. Vlcek Mater. Chem. Phys. 54 1998 116