Effect of thin film confinement on the transport properties of ultra-thin polymer films

Materials Research Society Symposium - Proceedings

Volumn 790, Issue , 2003, Pages 203-208

  Singh, Lovejeet ^a   Ludovice, Peter J ^a   Henderson, Clifford L ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; MOLECULAR WEIGHT; PHOTORESISTS; POLYMERIC MEMBRANES; SORPTION; TRANSPORT PROPERTIES; ULTRATHIN FILMS; VAPORS;

CHEMICALLY AMPLIFIED PHOTORESISTS; DIFFUSION COEFFICIENTS; FILM THICKNESSES; QUARTZ CRYSTAL MICROBALANCE (QCM);

PLASTIC FILMS;

EID: 2942696387     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-790-p9.6     Document Type: Conference Paper

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