Trench homogeneity in plasma immersion ion implantation

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 161, Issue , 2000, Pages 1085-1089

  Huber, P ^a   Keller, G ^a   Gerlach, J W ^a   Mandl S ^a   Assmann, W ^b   Rauschenbach, B ^a  

^a UNIVERSITY OF AUGSBURG   (Germany)

^b UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTRONS; NEON; PLASMA APPLICATIONS; TWO DIMENSIONAL;

ELASTIC RECOIL DETECTION ANALYSIS; PARTICLE IN CELL CALCULATIONS; PLASMA IMMERSION ION IMPLANTATION;

ION IMPLANTATION;

EID: 0033871242     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00825-3     Document Type: Article

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