Lateral texture evolution during formation of TiN by MePIIID

Surface and Coatings Technology

Volumn 156, Issue 1-3, 2002, Pages 176-181

  Huber, P ^a   Manova, D ^a   Mandl S ^a,b   Rauschenbach, B ^b,c  

^a UNIVERSITY OF AUGSBURG   (Germany)

^b LEIBNIZ INSTITUTE OF SURFACE ENGINEERING IOM   (Germany)

^c UNIVERSITY OF LEIPZIG   (Germany)

Author keywords

Homogeneity; MePIIID; Texture; TiN; XRD

Indexed keywords

ION IMPLANTATION; TEXTURES; TITANIUM NITRIDE;

DUTY CYCLE;

COATING TECHNIQUES;

TITANIUM NITRIDE;

EID: 0036641416     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(02)00125-1     Document Type: Article

References (30)