Defects involving oxygen in crystalline silicon

Solid State Phenomena

Volumn 85-86, Issue , 2002, Pages 285-316

  Sassella, A ^a  

^a UNIVERSITY OF MILANO BICOCCA   (Italy)

Author keywords

Concentration measurement; Device performance; Oxygen impurity; Oxygen precipitation; Precipitate morphology; Precipitate study

Indexed keywords

CRYSTAL DEFECTS; CRYSTALLOGRAPHY; CRYSTALS; NONMETALS; OXYGEN; SILICON; SINGLE CRYSTALS;

(100) SILICON; (PL) PROPERTIES; CRYSTALLINE SILICONS; DEFECT INTERACTIONS; DIFFERENT EFFECTS; MICRO-ELECTRONIC DEVICES; OXYGEN IN SILICON;

SILICON WAFERS;

EID: 24544446008     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Article

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