Observation of change in shape of oxygen precipitates in high-temperature annealed silicon by transmission electron microscopy

Applied Physics Letters

Volumn 74, Issue 12, 1999, Pages 1675-1676

  Sakai, K ^a   Yamagami, T ^a   Ojima, K ^a  

^a NATIONAL DEFENSE ACADEMY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CRYSTAL GROWTH FROM MELT; HIGH TEMPERATURE OPERATIONS; OXYGEN; PRECIPITATION (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

CRYSTAL ORIGINATED PARTICLES (COP);

SEMICONDUCTING SILICON;

EID: 0032607135     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123651     Document Type: Article

References (7)

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