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Volumn 436, Issue , 1996, Pages
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Hardness and deformation mechanisms of highly elastic carbon nitride thin films as studied by nanoindentation
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Author keywords
[No Author keywords available]
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Indexed keywords
ATOMIC FORCE MICROSCOPY;
ELASTIC MODULI;
ELASTICITY;
HARDNESS;
INTERFACES (MATERIALS);
MECHANICAL PROPERTIES;
MECHANICAL VARIABLES MEASUREMENT;
NITRIDES;
PLASTIC DEFORMATION;
SURFACE PHENOMENA;
CYCLIC CONTACT;
ELASTIC CARBON NITRIDE FILMS;
ELASTIC RECOVERIES;
NANOINDENTATION;
SURFACE CONTACT;
THIN FILMS;
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EID: 0030394638
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-436-275 Document Type: Conference Review |
Times cited : (3)
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References (12)
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