Damaging process of α-SiC under electron irradiation studied with electron microscopy and spectroscopy

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 191, Issue 1-4, 2002, Pages 519-523

  Muto, S ^a   Tanabe, T ^a   Shibayama, T ^b   Takahashi, H ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b HOKKAIDO UNIVERSITY   (Japan)

Author keywords

6H SiC; Amorphization; Electron spectroscopy; Transmission electron microscopy

Indexed keywords

AMORPHIZATION; CRYSTAL LATTICES; ELECTRON ENERGY LOSS SPECTROSCOPY; ELECTRON IRRADIATION; LOW TEMPERATURE EFFECTS; MOLECULAR DYNAMICS; NEUTRON IRRADIATION; RADIATION DAMAGE; TRANSMISSION ELECTRON MICROSCOPY;

STRUCTURAL DISORDERING;

SILICON CARBIDE;

EID: 0036574736     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(02)00603-1     Document Type: Article

References (10)