FIB for the evaluation of non-semiconductor materials

Microstructural Science

Volumn 26, Issue , 1998, Pages 233-241

  Rowlands, N ^a   Munroe, P ^b  

^a Advanced Microscopy Techniques   (United States)

^b UNIVERSITY OF NEW SOUTH WALES   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAMS; ELECTROSTATIC LENSES; ENERGY DISPERSIVE SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SECONDARY ION MASS SPECTROMETRY;

ELECTROMAGNETIC LENSES; FOCUSED ION BEAMS; LIQUID ION METAL SOURCE; OPTICAL CONFIGURATION;

ION BEAMS;

EID: 0141844622     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. Basile, D.P., Boylan, R., Baker, B., Hayes,K. Soza, D., FIBXTEM - Focused ion beam milling for TEM sample preparation. 254 In: Mat. Res. Soc. Symp. Proc. R. Andersson, R., Tracy, B. and Bravman, J. (eds.), MRS Pittsburgh, pp. 23-41.
2. Davis, R.B., 1997, Preparation of samples for mechanical property testing using the FIB workstation. Microstr. Sci., 25, 511-515.
3. Ishitani, T., Hirose, H. and Tsuboi, H., 1995. Focused-ion-beam digging of biological specimens. J. Electron Microsc., 44, 110-114.
4. Ishitani, T., and Tsuboi, H., 1996. Objective Comparison of Scanning Ion and Scanning Electron Microscope Images. Scanning 19, 489-497.
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8. Phaneuf, M.W., Rowlands, N., Carpenter, G.J.C. and Sundaram, G. 1997 Focused ion beam sample preparation of non-semiconductor materials. In: Mat. Res. Soc. Symp., 480. Anderson, R. (ed.), MRS Pittsburgh, pp. 39-48.
9. Prewett, P.D. and Mair, G.L.R., 1991, Focused Ion Beams from Liquid Metal Ion Sources, Research Studies Press Ltd., Taunton, Somerset, England.
10. Young, R. J., 1997. Application of the focused ion beam in materials characterization and failure analysis. Microstruct. Sci., 25, 491-496.