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Materials Research Society Symposium - Proceedings

Volumn 795, Issue , 2003, Pages 159-165

A membrane deflection fracture experiment to investigate fracture toughness of freestanding MEMS materials

(2) Espinosa, H D a Peng, B a

a NONE

Author keywords

[No Author keywords available]

Indexed keywords

BOUNDARY CONDITIONS; CRACKS; CRYSTALLINE MATERIALS; DIAMONDS; FRACTURE TOUGHNESS; ION BEAMS; OPTICAL MICROSCOPY; PARAMETER ESTIMATION; POLYSILICON; STRESS ANALYSIS; THIN FILMS;

MEMBRANE DEFLECTION; PRE-EXISTING CRACKS; THIN-FILM MEMBRANES; ULTRANANOCRYSTALLINE DIAMONDS (UNCD);

MICROELECTROMECHANICAL DEVICES;

EID: 2442464767 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-795-u4.10 Document Type: Conference Paper

Times cited : (1)

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