Helicon plasma with additional immersed antenna

Journal of Physics D: Applied Physics

Volumn 37, Issue 9, 2004, Pages 1334-1341

  Aanesland, A ^a,b   Charles, C ^a,c   Boswell, R W ^a   Fredriksen, A ^c  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^b UNIVERSITY OF TROMSØ   (Norway)

^c CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; DIELECTRIC MATERIALS; ETCHING; GLASS; HELICONS; INDUCTIVELY COUPLED PLASMA; MAGNETIC FIELD EFFECTS; PHASE SHIFT; PLASMA DENSITY;

ETCH INSULATORS; HELICON PLASMAS; ION ENERGIES; PLASMA POTENTIALS;

PLASMA THEORY;

EID: 2442433837     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/37/9/006     Document Type: Article

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