Characterisation of high voltage pulser performance in radiofrequency plasmas

Surface and Coatings Technology

Volumn 93, Issue 2-3, 1997, Pages 181-187

  Collins, G A ^a   Short, K T ^a   Tendys, J ^a  

^a AUSTRALIAN NUCLEAR SCIENCE AND TECHNOLOGY ORGANISATION   (Australia)

Author keywords

High voltage pulsing; Plasma immersion; R.f. plasma

Indexed keywords

CURRENT DENSITY; EMISSION SPECTROSCOPY; IONIZATION; PLASMA DENSITY; PLASMA SHEATHS; PLASMA SOURCES; SPUTTERING;

HIGH VOLTAGE PULSER; PLASMA IMMERSION ION IMPLANTATION; RADIOFREQUENCY PLASMAS;

ION IMPLANTATION;

EID: 0031221568     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00041-8     Document Type: Article

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