Linear surface smoothening of (Ti0.48Al0.52)N thin films grown on rough substrates

Applied Physics Letters

Volumn 86, Issue 25, 2005, Pages 1-3

  Liu, Z J ^a   Shum, P W ^a   Shen, Y G ^a  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; DIFFUSION; LINEAR EQUATIONS; SHOT NOISE; STEEL; SUBSTRATES; SURFACE ROUGHNESS; THIN FILMS;

HIGH-SPEED-STEEL (HSS) SUBSTRATES; MULLINS DIFFUSION EQUATION; SILICON FILMS; SURFACE SMOOTHENING;

TITANIUM COMPOUNDS;

EID: 24344431664     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1947905     Document Type: Article

References (20)

1. F. Family and T. Vicsek, J. Phys. A 18, L75 (1985).
2. H. You, R. P. Chiarello, H. K. Kim, and K. G. Vandervoort, Phys. Rev. Lett. 70, 2900 (1993).
3. G. W. Collins, S. A. Letts, E. M. Fearon, R. L. McEachern, and T. P. Bernat, Phys. Rev. Lett. 73, 708 (1994).
4. H.-N. Yang, Y.-P. Zhao, G.-C. Wang, and T.-M. Lu, Phys. Rev. Lett. 76, 3774 (1996).
5. J. G. Yoon, H. K. Oh, and S. J. Lee, Phys. Rev. B 60, 2839 (1999).
6. C. Eisenmenger-Sittner, J. Appl. Phys. 89, 6085 (2001).
7. B. Q. Li, I. Kojima, and J. M. Zou, J. Appl. Phys. 91, 4082 (2002).
8. J. Xu, L. Yu, and I. Kojima, J. Appl. Phys. 94, 6827 (2003).
9. M. F. Gyure, J. J. Zinck, C. Ratsch, and D. D. Vvedensky, Phys. Rev. Lett. 81, 4931 (1998).
10. A. Ballestad, B. J. Ruck, M. Adamcyk, T. Pinington, and T. Tiejie, Phys. Rev. Lett. 86, 2377 (2001).
11. B. Sperling and R. Abelson, Appl. Phys. Lett. 85, 3456 (2004).
12. M. Kardar, G. Parisi, and Y. C. Zhang, Phys. Rev. Lett. 56, 889 (1986).
13. W. W. Mullins, J. Appl. Phys. 28, 333 (1957).
14. M. Beccaria and G. Curci, Phys. Rev. E 50, 4560 (1994).
15. S. Das Sarma and P. I. Tamborenea, Phys. Rev. Lett. 66, 325 (1991).
16. N.-E. Lee, D. G. Cahill, and J. E. Greene, Phys. Rev. B 53, 7876 (1996).
17. L. Golubovic, Phys. Rev. Lett. 78, 90 (1997).
18. J. Yu and J. G. Amar, Phys. Rev. E 66, 021603 (2002).
19. G. Palasantzas, Phys. Rev. B 48, 14472 (1993).
20. Z. W. Lai and S. Das Sarma, Phys. Rev. Lett. 66, 2348 (1991).