Analysis of the uncertainty in the measurement of electron densities in plasmas using the wave cutoff method

Metrologia

Volumn 42, Issue 2, 2005, Pages 110-114

  Kim, Jung Hyung ^a   Chung, Kwang Hwa ^a   Shin, Yong Hyeon ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; DEPOSITION; ELECTRIC NETWORK ANALYZERS; PLASMA OSCILLATIONS; THIN FILMS;

LANGMUIR PROBE; PLASMA FREQUENCY; UNCERTAINTY; WAVE CUTOFF METHOD;

PLASMAS;

EID: 24144454673     PISSN: 00261394     EISSN: None     Source Type: Journal    
DOI: 10.1088/0026-1394/42/2/005     Document Type: Article

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