Design and characteristics of two-gimbals micro-gyroscopes fabricated with quasi-LIGA process

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 2, Issue , 1997, Pages 891-894

  Niu, Mengnian ^a   Xue, Weichen ^a   Wang, Xiaodong ^a   Xie, Jianfang ^a   Yang, Genqing ^a   Wang, Weiyuan ^a  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DESIGN; ELECTRODES; FABRICATION; FINITE ELEMENT METHOD; NATURAL FREQUENCIES; TORQUE; VIBRATIONS (MECHANICAL);

CORIOLI FORCE; QUASI LIGA PROCESS; TWO GIMBALS MICRO GYROSCOPES;

GYROSCOPES;

EID: 0030675962     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)