Modularized simulation for lot delivery time forecast in automatic material handling systems of 300 mm semiconductor manufacturing

International Journal of Advanced Manufacturing Technology

Volumn 26, Issue 5-6, 2005, Pages 645-652

  Liang, Shing Ko ^a   Wang, Chia Nan ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b KAINAN UNIVERSITY   (Taiwan)

Author keywords

300 mm semiconductor manufacturing; AMHS; Delivery time forecast; Simulation

Indexed keywords

AUTOMATION; COMPUTER SIMULATION; MATHEMATICAL MODELS; SCHEDULING; STATISTICAL METHODS;

300 MM SEMICONDUCTOR MANUFACTURING; AMHS; DELIVERY TIME FORECAST; FAB SCHEDULING;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 24144448737     PISSN: 02683768     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00170-003-2015-1     Document Type: Article

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