Structure, mechanical properties and thermal stability of diamond-like carbon films prepared by arc ion plating

Acta Metallurgica Sinica (English Letters)

Volumn 18, Issue 3, 2005, Pages 331-338

  Zou, Y S ^a   Zheng, J D ^a   Gong, J ^a,b   Sun, C ^a,b   Huang, R F ^a   Wen, L S ^a  

^a INSTITUTE OF METAL RESEARCH   (China)

^b Shenyang Research Center for Interfacial Materials   (China)

Author keywords

Arc ion plating; Diamond like carbon; Mechanical property; Micro structure; Thermal stability

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; BONDING; DIAMONDS; ELASTIC MODULI; FILMS; HARDNESS; PHOTOELECTRON SPECTROSCOPY; PLATING; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; THERMODYNAMIC STABILITY; WEAR RESISTANCE; X RAY PHOTOELECTRON SPECTROSCOPY;

ANNEALING TEMPERATURE; ARC ION PLATING; DIAMOND LIKE CARBON (DLC) FILM; FRICTION COEFFICIENT; HYDROGEN ATMOSPHERE; NANOINDENTATION TESTS; SILICON SUBSTRATE; THERMAL STABILITY;

CARBON;

EID: 24044469348     PISSN: 10067191     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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