SCOPUS 정보 검색 플랫폼

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 19, Issue 6, 2001, Pages 2826-2830

Sound velocity and Young's modulus in plasma deposited amorphous hydrogenated carbon

(5) Dillon, R O a Ali, Abbas a Ianno, N J a Ahmad, A a Furtak, T b

a UNIVERSITY OF NEBRASKA LINCOLN (United States)

b Department of Geology and Geological Engineering (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVE VELOCITY; AMORPHOUS FILMS; ELASTIC MODULI; ELASTICITY; HYDROGEN; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; PROFILOMETRY; RAMAN SPECTROSCOPY; SILICON; SUBSTRATES;

CARBON FILMS;

CARBON;

EID: 0035507492 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.1407242 Document Type: Article

Times cited : (8)

References (22)

1
- 0027595180
- (1993) Thin Solid Films , vol.28 , pp. 289
- Savvides, N.¹ Bell, T.J.²

2
- 0037613212
- edited by R. E. Clausing, L. L. Horton, J. C. Angus, and P. Koidl (Plenum, New York)
- (1991) Diamond and Diamond-Like Films and Coatings NATO-ASI-Series , pp. 173
- Angus, J.C.¹ Wang, Y.²

3
- 0001356099
- (1995) Appl. Phys. Lett. , vol.68 , pp. 779
- Pharr, G.M.¹ Callahan, D.L.² McAdams, S.D.³ Tsui, T.Y.⁴ Anders, S.⁵ Anders, A.⁶ Ager, J.W.⁷ Brown, I.G.⁸ Bhatia, C.S.⁹ Silva, S.R.P.¹⁰ Robertson, J.¹¹

4
- 0001233686
- (1998) Appl. Phys. Lett. , vol.73 , pp. 759
- Siegal, M.P.¹ Barfour, J.C.² Provencio, P.N.³ Tallant, D.R.⁴ Friedmann, T.A.⁵

5
- 36549093076
- (1989) J. Appl. Phys. , vol.65 , pp. 1918
- Hoshino, S.¹ Fujii, K.² Shohata, N.³ Yuji, H.⁴ Masahiro⁵

6
- 0006842377
- Ref. 2
- Field, J.E.¹

7
- 0000365782
- (1989) J. Appl. Phys. , vol.66 , pp. 4729
- Jiang, X.¹ Zou, J.W.² Reichelt, K.³ Grunberg, P.⁴

8
- 0001280972
- (1990) J. Appl. Phys. , vol.68 , pp. 1018
- Jiang, X.¹ Reichelt, K.² Stritzker, B.³

9
- 0000715415
- (1997) J. Appl. Phys. , vol.82 , pp. 4566
- Sattel, S.¹ Robertson, J.² Ehrhardt, H.³

10
- 0006844712
- edited by A. Feldman, Y. Tzeng, W. A. Yarbough, M. Yoshikawa, and M. Murakawa
- (1995) Applications of Diamond Filmsm and Related Materials: Third International Conference , pp. 805
- Anders, S.¹ Anders, A.² Bhatia, C.S.³ Raoux, S.⁴ Schneider, D.⁵ Ager, J.W.⁶ Brown, I.G.⁷

11
- 0009355065
- (1997) Philos. Mag. B , vol.76 , pp. 351
- Xu, S.¹ Flynn, D.² Tay, B.K.³ Prawer, S.⁴ Nugent, K.W.⁵ Silva, S.R.P.⁶ Lifshitz, Y.⁷ Milne, W.I.⁸

12
- 0000075431
- (1997) Appl. Phys. Lett. , vol.71 , pp. 3820
- Friedmann, T.A.¹ Sullivan, J.P.² Knapp, J.A.³ Tallant, D.R.⁴ Follstaedt, D.M.⁵ Medlin, D.L.⁶ Mirkarimi, P.B.⁷

13
- 0000016095
- (1985) J. Vac. Sci. Technol. A , vol.3 , pp. 674
- Cox-Smith, I.R.¹ Liang, H.C.² Dillon, R.O.³

14
- 0017471372
- (1977) Solid State Commun. , vol.21 , pp. 1039
- Testardi, L.R.¹ Hauser, J.J.²

15
- 0000021091
- (1989) Phys. Rev. B , vol.40 , pp. 5956
- Datta, T.¹ Woollam, J.A.² Notohamiprodjo, W.³

16
- 4243838831
- (1989) Mater. Sci. Forum , vol.52-53 , pp. 71
- Tsai, H.¹

17
- 0006810731
- (1989) Mater. Sci. Forum , vol.52-53 , pp. 515
- Thompson, D.G.¹

18
- 0346974565
- (1991) Prog. Solid State Chem. , vol.21 , pp. 199
- Robertson, J.¹

19
- 0006770683
- Ref. 2
- Koidl, P.¹ Wild, C.² Locher, R.³ Sah, R.E.⁴

20
- 0242603790
- (2000) Phys. Rev. B , vol.61 , pp. 14095
- Ferrari, A.C.¹ Robertson, J.²

21
- 33645143382
- (1984) Phys. Rev. B , vol.29 , pp. 3482
- Dillon, R.O.¹ Woollam, J.A.² Katkanant, V.³

22
- 21344482790
- (1993) J. Vac. Sci. Technol. A , vol.11 , pp. 3007
- Lee, H.J.¹ Zubeck, R.² Hollars, D.³ Lee, J.K.⁴ Smallen, M.⁵ Chao, A.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.