Effects of microstructure on the properties of ferroelectric lead zirconate titanate (PZT) thin films

Applied Physics A: Materials Science and Processing

Volumn 81, Issue 5, 2005, Pages 1089-1093

  Goh, W C ^a   Yao, K ^b   Ong, C K ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b INSTITUTE OF MATERIALS RESEARCH AND ENGINEERING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC MATERIALS; LEAD COMPOUNDS; MICROSTRUCTURE; PEROVSKITE; PULSED LASER DEPOSITION; SOL-GELS;

FILM PROPERTIES; REMANENT; VOLTAGE CONSTANT;

THIN FILMS;

EID: 23944469341     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00339-004-2964-8     Document Type: Article

References (12)

1. K.T. Kim, C.I. Kim, S.G. Lee: Microelectron. Eng. 66, 662 (2003)
2. N. Ledemann, P. Muralt, J. Baborowski, S. Gentil, K. Mukati, M. Cantoni, A. Seifert, N. Setten: Sens. Actuators A 11, 162 (2003)
3. K.R. Udaykumar, P. Schnele, J. Chen, S. Krupanidhi, L. Cross: J. Appl. Phys.77, 3981 (1995)
4. W.C. Goh, S.Y. Xu, S.J. Wang, C.K. Ong: J. Appl. Phys. 89, 4497 (2001)
5. J.K. Yang, W.S. Kim, H.R. Park: Appl. Surf. Sci. 169, 544 (2001)
6. M. Alguero, M.L. Calzada, E. Snoeck, L. Pardo: J. Eur. Ceram. Soc. 19, 1501 (1999)
7. S. Yu, K. Yao, S. Shannigrahi, F.E.H. lay: J. Mater. Res. 18, 737 (2003)
8. M. Kim, J. Choi, S. Yoon, K.H. Yoon, H. Kim: Jpn. J. Appl. Phys. 41, 3817 (2002)
9. H. Fujita, S. Gto, M. Skashita, H. Ikeda, A. Sakai, S. Zaima, Y. Yasuda: Jpn. J. Appl. Phys. 39, 7035 (2000)
10. T. Kumazawa, Y. Kumagai, H. Miura, M. Kitano: Appl. Phys. Lett. 75, 608 (1998)
11. T.M. Shaw, Z. Suo, M. Huang, E. Liniger, R.B. Laibowitz, J.D. Baniecki: Appl. Phys. Lett. 75, 2129 (1999)
12. K. Yao, S. Yu, F.E.H. Tay: Appl. Phys. Lett. 82, 4540 (2003)