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Electrochimica Acta

Volumn 50, Issue 23 SPEC. ISS., 2005, Pages 4525-4530

MOCVD of hard metallurgical coatings: Examples in the Cr-C-N system

(1) Maury, F a

a CNRS (France)

Author keywords

Chromium carbides; Chromium nitrides; Hard coatings; Metalorganic precursors; MOCVD

Indexed keywords

ATMOSPHERIC PRESSURE; CHROMIUM COMPOUNDS; HIGH TEMPERATURE EFFECTS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; PHASE COMPOSITION; PROTECTIVE COATINGS; TENSILE TESTING; X RAY LITHOGRAPHY;

CHROMIUM CARBIDE; CHROMIUM NITRIDES; HARD COATING; METALORGANIC PRECURSORS;

TERNARY SYSTEMS;

EID: 23844525923 PISSN: 00134686 EISSN: None Source Type: Journal
DOI: 10.1016/j.electacta.2004.10.088 Document Type: Article

Times cited : (10)

References (26)

1
- 84916809891
- J.-E. Sundgren, and H.T.G. Hentzell J. Vac. Sci. Technol. A 4 1986 2259
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2259
- Sundgren, J.-E.¹ Hentzell, H.T.G.²

2
- 0022489379
- H. Holleck J. Vac. Sci. Technol. A 4 1986 2661
- (1986) J. Vac. Sci. Technol. A , vol.4 , pp. 2661
- Holleck, H.¹

3
- 0031493594
- F. Esaka, K. Furuya, H. Shimada, M. Imamura, N. Matsubayashi, H. Sato, A. Nishijima, A. Kawana, H. Ichimura, and T. Kikuchi J. Vac. Sci. Technol. A 15 1997 2521
- (1997) J. Vac. Sci. Technol. A , vol.15 , pp. 2521
- Esaka, F.¹ Furuya, K.² Shimada, H.³ Imamura, M.⁴ Matsubayashi, N.⁵ Sato, H.⁶ Nishijima, A.⁷ Kawana, A.⁸ Ichimura, H.⁹ Kikuchi, T.¹⁰

4
- 0033373183
- G. Aldrich-Smith, D.G. Teer, and P.A. Dearnley Surf. Coat. Technol. 116-119 1999 1161
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 1161
- Aldrich-Smith, G.¹ Teer, D.G.² Dearnley, P.A.³

5
- 0031747489
- P. Engel, G. Schwarz, and G.K. Wolf Surf. Coat. Technol. 98 1998 1002
- (1998) Surf. Coat. Technol. , vol.98 , pp. 1002
- Engel, P.¹ Schwarz, G.² Wolf, G.K.³

6
- 0031246458
- P. Hones, R. Sanjines, and F. Levy Surf. Coat. Technol. 94-95 1997 398
- (1997) Surf. Coat. Technol. , vol.94-95 , pp. 398
- Hones, P.¹ Sanjines, R.² Levy, F.³

7
- 0342263125
- J.A. Sue, and T.P. Chang Surf. Coat. Technol. 76-77 1995 61
- (1995) Surf. Coat. Technol. , vol.76-77 , pp. 61
- Sue, J.A.¹ Chang, T.P.²

8
- 0031260758
- S.H. Yao, and Y.L. Su Wear 212 1997 85
- (1997) Wear , vol.212 , pp. 85
- Yao, S.H.¹ Su, Y.L.²

9
- 0346192728
- J.F. Nowak, C. Duret-Thual, F. Maury, D. Oquab, Bull. Cercle Etudes Metaux, 15 (1987) 14.1.
- (1987) Bull. Cercle Etudes Metaux , vol.15 , pp. 141
- Nowak, J.F.¹ Duret-Thual, C.² Maury, F.³ Oquab, D.⁴

10
- 0033379044
- L. Cunha, M. Andritschky, L. Rebouta, and K. Pischow Surf. Coat. Technol. 116-119 1999 1152
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 1152
- Cunha, L.¹ Andritschky, M.² Rebouta, L.³ Pischow, K.⁴

11
- 0020834577
- M. Sikkens, A. Van Heereveld, and E. Volgelzang Thin Solid Films 108 1983 229
- (1983) Thin Solid Films , vol.108 , pp. 229
- Sikkens, M.¹ Van Heereveld, A.² Volgelzang, E.³

12
- 0032631781
- J.-C. Chuang, S.-L. Tu, and M.-C. Chen J. Electrochem. Soc. 146 1999 2643
- (1999) J. Electrochem. Soc. , vol.146 , pp. 2643
- Chuang, J.-C.¹ Tu, S.-L.² Chen, M.-C.³

13
- 0032048574
- S. Tsuboi, M. Seki, S. Kotsuji, T. Yoshihara, K. Fujii, and K. Suzuki NEC Res. Dev. 39 1998 127
- (1998) NEC Res. Dev. , vol.39 , pp. 127
- Tsuboi, S.¹ Seki, M.² Kotsuji, S.³ Yoshihara, T.⁴ Fujii, K.⁵ Suzuki, K.⁶

14
- 0000290186
- P.M. Fabis, R.A. Cooke, and S. McDonough J. Vac. Sci. Technol. A 8 1990 3819
- (1990) J. Vac. Sci. Technol. A , vol.8 , pp. 3819
- Fabis, P.M.¹ Cooke, R.A.² McDonough, S.³

15
- 5544240687
- M. Taguchi, and H. Takahashi J. Jpn. Inst. Met. 56 1992 1221
- (1992) J. Jpn. Inst. Met. , vol.56 , pp. 1221
- Taguchi, M.¹ Takahashi, H.²

16
- 0345322154
- J. Milosev, and B. Navinsek J. Electrochem. Soc. 140 1993 L30
- (1993) J. Electrochem. Soc. , vol.140
- Milosev, J.¹ Navinsek, B.²

17
- 0032027970
- C. Vahlas, F. Maury, and L. Gueroudji Adv. Mater. Chem. Vap. Deposition 4 1998 69
- (1998) Adv. Mater. Chem. Vap. Deposition , vol.4 , pp. 69
- Vahlas, C.¹ Maury, F.² Gueroudji, L.³

18
- 0033317723
- F. Maury, C. Vahlas, S. Abisset, and L. Gueroudji J. Electrochem. Soc. 146 1999 3716
- (1999) J. Electrochem. Soc. , vol.146 , pp. 3716
- Maury, F.¹ Vahlas, C.² Abisset, S.³ Gueroudji, L.⁴

19
- 0026218840
- F. Schuster, F. Maury, J.F. Nowak, and C. Bernard Surf. Coat. Technol. 46 1991 275
- (1991) Surf. Coat. Technol. , vol.46 , pp. 275
- Schuster, F.¹ Maury, F.² Nowak, J.F.³ Bernard, C.⁴

20
- 2542596513
- R. Kieffer, P. Ettmayer, and T. Bubsky Z. Metallkde. 58 1967 560
- (1967) Z. Metallkde. , vol.58 , pp. 560
- Kieffer, R.¹ Ettmayer, P.² Bubsky, T.³

21
- 33645330830
- M.D. Allendorf M.L. Hitchman Electrochem. Soc. Pennington, NJ
- F. Maury, D. Duminica, and F. Senocq M.D. Allendorf M.L. Hitchman Chem. Vap. Deposition XV. Electrochem. Soc. Proc. Vol., PV, 2000-13 2000 Electrochem. Soc. Pennington, NJ 260
- (2000) Chem. Vap. Deposition XV. Electrochem. Soc. Proc. Vol., PV, 2000-13 , pp. 260
- Maury, F.¹ Duminica, D.² Senocq, F.³

22
- 0032476285
- R. Sanjines, P. Hones, and F. Levy Thin Solid Films 332 1998 225
- (1998) Thin Solid Films , vol.332 , pp. 225
- Sanjines, R.¹ Hones, P.² Levy, F.³

23
- 0034310615
- F. Maury, F. Ossola, and F. Senocq Surf. Coat. Technol. 133-134 2000 198 202
- (2000) Surf. Coat. Technol. , vol.133-134 , pp. 198-202
- Maury, F.¹ Ossola, F.² Senocq, F.³

24
- 0037345363
- March
- W.-D. Münz, MRS Bulletin, 28, March 2003, p. 173.
- (2003) MRS Bulletin , vol.28 , pp. 173
- Münz, W.-D.¹

25
- 1842772221
- E. Martínez, J. Romero, A. Lousa, and J. Esteve Surf. Coat. Technol. 163-164 2003 571
- (2003) Surf. Coat. Technol. , vol.163-164 , pp. 571
- Martínez, E.¹ Romero, J.² Lousa, A.³ Esteve, J.⁴

26
- 0037472820
- J. Romero, A. Lousa, E. Martínez, and J. Esteve Surf. Coat. Technol. 163-164 2003 392
- (2003) Surf. Coat. Technol. , vol.163-164 , pp. 392
- Romero, J.¹ Lousa, A.² Martínez, E.³ Esteve, J.⁴

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