Electrochemical etching of silicon through anodic porous alumina

Electrochemistry Communications

Volumn 7, Issue 9, 2005, Pages 953-956

  Asoh, Hidetaka ^a   Sasaki, Kunimitsu ^a   Ono, Sachiko ^a  

^a KOGAKUIN UNIVERSITY   (Japan)

Author keywords

Anodic porous alumina; Electrochemical etching; Nanoporous structure; Patterning; Porous silicon

Indexed keywords

ALUMINA; ANODIC OXIDATION; ELECTROCHEMISTRY; ETCHING; NANOSTRUCTURED MATERIALS; OPTICAL PROPERTIES; POROUS MATERIALS; SUBSTRATES;

ANODIC POROUS ALUMINA; ELECTROCHEMICAL ETCHING; NANOPOROUS STRUCTURE; PATTERNING;

POROUS SILICON;

EID: 23844491526     PISSN: 13882481     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.elecom.2005.06.014     Document Type: Article

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