SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium Proceedings

Volumn EXS, Issue 2, 2004, Pages 17-20

Microsystems manufacturing via embossing of thermally sacrificial polymers

(4) Henderson, Clifford L a King, William P b White, Celesta E a Rowland, Harry R b

a Georgia Institute of Technology (United States)

b GEORGIA INSTITUTE OF TECHNOLOGY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

IMPRINT LITHOGRAPHY (IL); MICROSYSTEMS MANUFACTURING; NANOFLUIDIC DEVICES; THERMALLY SACRIFICIAL POLYMERS;

ELECTROPOLYMERIZATION; FLUIDIC DEVICES; LAYERED MANUFACTURING; LITHOGRAPHY; MICROELECTRODES; MICROELECTRONICS; MICROFILM; MICROSTRUCTURE; SUPERCONDUCTING TRANSITION TEMPERATURE; SURFACE TREATMENT;

POLYMERS;

EID: 23844490096 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (3)

References (8)

1
- 79958221815
- H. Cao, Z. Yu, J. Wang, J. O. Tegenfeldt, R. H. Austin, E. Chen, W. Wu and S. Y. Chou, Appl. Phys. Lett., 81(1), 174-176 (2002).
- (2002) Appl. Phys. Lett. , vol.81 , Issue.1 , pp. 174-176
- Cao, H.¹ Yu, Z.² Wang, J.³ Tegenfeldt, J.O.⁴ Austin, R.H.⁵ Chen, E.⁶ Wu, W.⁷ Chou, S.Y.⁸

2
- 0034205554
- L. Montelius, B. Heidari, I. Graczyk, E.-L. Maximov and T. G. I. Ling, Microelectron. Eng., 53, 521-524 (2000).
- (2000) Microelectron. Eng. , vol.53 , pp. 521-524
- Montelius, L.¹ Heidari, B.² Graczyk, I.³ Maximov, E.-L.⁴ Ling, T.G.I.⁵

3
- 0036643572
- A. Pepin, P. Youinou, V. Studer, A. Lebib and Y. Chen, Microelectron. Eng., 61-62, 927-932 (2002).
- (2002) Microelectron. Eng. , vol.61-62 , pp. 927-932
- Pepin, A.¹ Youinou, P.² Studer, V.³ Lebib, A.⁴ Chen, Y.⁵

4
- 0037439678
- C. M. Sotomayor Torres, S. Zankovych, J. Seekamp, A. P. Kam, C. Clavijo Cedeno, T. Hoffman, J. Ahopelto, F. Reuther, K. Pfeiffer, G. Bleidiessel, G. Gruetzner, M. V. Maximov and B. Heidari, Materials Science & Engineering, C, C23, 23-31 (2003).
- (2003) Materials Science & Engineering, C , vol.C23 , pp. 23-31
- Sotomayor Torres, C.M.¹ Zankovych, S.² Seekamp, J.³ Kam, A.P.⁴ Clavijo Cedeno, C.⁵ Hoffman, T.⁶ Ahopelto, J.⁷ Reuther, F.⁸ Pfeiffer, K.⁹ Bleidiessel, G.¹⁰ Gruetzner, G.¹¹ Maximov, M.V.¹² Heidari, B.¹³

5
- 0035450338
- K. Pfeiffer, M. Fink, G. Gruetzner, G. Bleidiessel, H. Schulz and H. Scheer, Microelectron. Eng., 57-58, 381-387 (2001).
- (2001) Microelectron. Eng. , vol.57-58 , pp. 381-387
- Pfeiffer, K.¹ Fink, M.² Gruetzner, G.³ Bleidiessel, G.⁴ Schulz, H.⁵ Scheer, H.⁶

6
- 0036378969
- H. Schulz, M. Wissen, N. Roos, H.-C. Scheer, K. Pfeiffer and G. Gruetzner, Proc. SPIE-Int. Soc. Opt. Eng., 4688(Pt. 1), 223-231 (2002).
- (2002) Proc. SPIE-Int. Soc. Opt. Eng. , vol.4688 , Issue.1 PT , pp. 223-231
- Schulz, H.¹ Wissen, M.² Roos, N.³ Scheer, H.-C.⁴ Pfeiffer, K.⁵ Gruetzner, G.⁶

7
- 0037529339
- W. Li, J. O. Tegenfeldt, L. Chen, R. H. Austin, S. Y. Chou, P. A. Kohl, J. Krotine and J. C. Sturm, Nanotechnology, 14, 578-583 (2003).
- (2003) Nanotechnology , vol.14 , pp. 578-583
- Li, W.¹ Tegenfeldt, J.O.² Chen, L.³ Austin, R.H.⁴ Chou, S.Y.⁵ Kohl, P.A.⁶ Krotine, J.⁷ Sturm, J.C.⁸

8
- 0037414357
- X. Wu, H. A. Reed, L. F. Rhodes, E. Elce, R. Ravikiran, R. A. Shick, C. L. Henderson, S. A. Bidstrup-Allen and P. A. Kohl, J. Appl. Polym. Sci., 88(5), 1186-1195 (2003).
- (2003) J. Appl. Polym. Sci. , vol.88 , Issue.5 , pp. 1186-1195
- Wu, X.¹ Reed, H.A.² Rhodes, L.F.³ Elce, E.⁴ Ravikiran, R.⁵ Shick, R.A.⁶ Henderson, C.L.⁷ Bidstrup-Allen, S.A.⁸ Kohl, P.A.⁹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.