Optimization of Optical Coatings for the UV/VUV-Range

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5188, Issue , 2003, Pages 80-95

  Ristau, Detlev ^a   Günster, Stefan ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

Absorptance; Fluoride coatings; Spectrometry; Total scattering; UV spectral range

Indexed keywords

ABSORPTION; EXCIMER LASERS; REFRACTIVE INDEX; SCATTERING; SPECTROPHOTOMETERS; SPUTTERING; ULTRATHIN FILMS;

FLUORIDE COATINGS; MULTILAYER STRUCTURES; TOTAL SCATTERING; UV-SPECTRAL RANGE;

OPTICAL COATINGS;

EID: 2342622122     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.507067     Document Type: Conference Paper

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