Development of a photothermal microscope for multi-scale studies of defects

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4679, Issue , 2002, Pages 400-409

  During, Annelise ^a   Fossati, Caroline ^a   Commandré, Mireille ^a  

^a AIX MARSEILLE UNIVERSITÉ   (France)

Author keywords

Absorption; Multi scale studies; Optical thin films; Photothermal deflection

Indexed keywords

ATOMIC FORCE MICROSCOPY; LASER BEAMS; LASER DAMAGE; LIGHT ABSORPTION; PUMPING (LASER); THIN FILMS;

PHOTOTHERMAL MICROSCOPES;

OPTICAL COATINGS;

EID: 0036033566     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.461681     Document Type: Article

References (28)

1. T.W. Walker, A.H. Guenther, P. Nielsen' Pulsed laser-induced damage to thin-film optical coatings. II Theory' IEEE J. Quantum Electron. QE-17, 2053-65 (1981).
2. M.R. Kozlowski, R. Chow' The role of defects in laser damage of multilayer coatings", in Laser-induced damage in optical materials: 1993, H. Bennett, L. Chase, A. Guenther, B. Newnam, and M. Soileau, eds., proceedings of SPIE 2114, 640-649 (1994).
3. J. Dijon, T. Poiroux, C. Desrumeaux' Nano absorbing centers: A key point in laser damage of thin films", in Laser-induced damage in optical materials: 1996, H. Bennett, A. Guenther, M. Kozlowski, B. Newnam, and M. Soileau, eds., proceedings of SPIE 2966, 315-325 (1997).
4. M.D. Feit, J. Campbell, D. Faux, F.Y. Genin, M.R. Kozlowski, A.M. Robenchik, R. Riddle, A. Salleo, J. Yoshiyama' Modeling of laser-induced surface cracks in silica at 355 nm", in Laser-induced damage in optical materials: 1997, H. Bennett, A. Guenther, M. Kozlowski, B. Newnam, and M. Soileau, eds., proceedings of SPIE 3244, 350-355 (1998).
5. M.F. Koldunov, A.A. Manenkov, I.L. Pokotilo' Thermoelastic and ablation mechanisms of laser damage to the surface of transparent solids", Quantum Electron.28, 269-73 (1998).
6. P.A. Temple' Examination of laser damage sites of transparent surfaces and films using internal reflection microscopy", Natl. Bur. Stand. (U.S.) Spec. Publ. 568, 333-341 (1979).
7. P.A. Temple' Total internal reflection microscopy: a surface inspection technique", Appl. Opt. 20, 2656-2664 (1981).
8. L. Sheehan, M.R. Kozlowski, D. Camp' Application of total internal reflection microscopy for laser damage studies on fused silica", in Laser-induced damage in optical materials: 1997, H. Bennett, A. Guenther, M. Kozlowski, B. Newnam, and M. Soileau, eds., proceedings of SPIE 3244, 282-295 (1998).
9. C. Amra' Light scattering from multilayer optics. Part A: Investigation tools", J. Opt. Soc. Am. 11, 197-210 (1994).
10. C. Amra' Light scattering from multilayer optics. Part B: Application to experiment", J. Opt. Soc. Am.11, 221-226 (1994).
11. S. Kassam, A. Duparré, K. Hehl, P. Bussemer, J. Neubert' Light scattering from the volume of optical thin films: theory and experiment", Appl. Opt. 31, 1304-1313 (1992).
12. S. Papernov, A.W. Schid, J. Anzelotti, D. Smith, Z.R. Chrzan' AFM-mapped, nanoscale, absorber-driven laser damage in UV high-reflector multilayers", in Laser-induced damage in optical materials: 1995, H. Bennett, A. Guenther, M. Kozlowski, B. Newnam, and M. Soileau, eds., proceedings of SPIE 2714, 384-394 (1996).
13. R.J. Tench, R. Chow, M.R. Kozlowski' Characterization of defect geometries in multilayer optical coatings", J. Vac. Sci. Technol. A 12, 2808-2813 (1994).
14. M.A. Paesler, P.J. Moyer' Near-field optics", John Wiley and Sons Ed., Inc., New York, (1996).
15. E. Welsch, M. Reichling' Micrometer resolved photothermal displacement inspection of optical coatings", J. Mod. Opt. 40(8), 1455-1475 (1993).
16. Z.L. Wu, M. Reichling, X.-Q. Hu, K. Balasubramanian, K.H. Guenther' Absorption and thermal conductivity of oxide thin films deposited by reactive low voltage ion plating measured by photothermal displacement and reflectance methods", Appl. Opt. 32 (28), 5660-5664 (1993).
17. A. Bodemann, N. Kaiser, M. Reichling, E. Welsch' Micrometer resolved inspection of defects and laser damage sites in UV high-reflecting coatings by photothermal displacement microscopy", J. Physique IV 4, C7611-C7614 (1994).
18. 2 single layer films", Optical Engineering 33, 4, 1334-1342 (1994).
19. E. Welsch, D. Ristau' Photothermal measurements on optical thin films", Appl. Opt. 34, 7239-7253 (1995).
20. E. Welsch' Absorption measurements", in R.E. Hummel, K.H. Guenther (eds.), Handbook of Optical Properties Vol I (Thin films for optical coatings), CRC Press, Boca Raton (1995).
21. 2 films by a collinear photothermal deflection technique", Applied Optics 29, 4276-4283 (1990).
22. M. Commandré, P. Roche, J.P. Borgogno, G. Albrand' Absorption mapping for characterization of glass surfaces", Appl. Opt. 34, 2372-2379 (1995).
23. M. Commandré, P. Roche' Characterization of optical coatings by photothermal deflection", Appl. Opt. 35, 5012-5034 (1996).
24. A. Gatto, M. Commandré' Statistical distribution of optical losses in bare substrates and thin films through increasing spatial windows", SPIE 3738, 197-207 (1999).
25. A. Gatto' Défauts locaux absorbants et diffusants - Rôle et évolution dans l’irradiation - Corrélation -Etude multi-échelles", Thèse de doctorat en Sciences, Université d’ Aix-Marseille III (1999).
26. E. Wesch, K. Ettrisch, D. Ristau, U. Willamowski' Absolute measurement of thermophysical and optical thin-film properties by photothermal methods for the investigation of laser damage", Int. J. Of Thermophysics, 20-3, 965-976 (1999).
27. A. Gatto, M. Commandré "Multiscale mapping technique for the simultaneous estimation of absorption and partial scattering in optical coatings", Appl. Opt. 41, (2002).
28. A. During, C. Fossati; M. Commandré' Multi-wavelength imaging of defects in UV optical materials", to be published in Applied Optics.