Investigation on total scattering at 157 nm and 193 nm

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4099, Issue , 2000, Pages 65-73

  Kadkhoda, P ^a   Welling, H ^a   Guenster, St ^a   Ristau, D ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; LASER APPLICATIONS; LIGHT SCATTERING; OPTICAL COATINGS; SPECTRUM ANALYSIS; THIN FILMS;

DEEP ULTRAVIOLET (DUV) SPECTRAL RANGES; TOTAL OPTICAL SCATTERING (TS);

OPTICAL SYSTEMS;

EID: 0034538622     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.405837     Document Type: Conference Paper

References (13)