Macromodeling temperature-dependent curl in CMOS micromachined beams

2001 International Conference on Modeling and Simulation of Microsystems - MSM 2001

Volumn , Issue , 2001, Pages 88-91

  Iyer, Sitaraman ^a   Lakdawala, Hasnain ^a   Fedder, Gary K ^a,b   Mukherjee, Tamal ^a  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

CMOS micromachining; Lumped parameter simulation; NODAS; Thermal multimorph

Indexed keywords

CMOS MICROMACHINING; LUMPED PARAMETER SIMULATION; NODAS; THERMAL MULTIMORPH;

BENDING MOMENTS; CANTILEVER BEAMS; CMOS INTEGRATED CIRCUITS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; MULTILAYERS; POLYSILICON; SENSITIVITY ANALYSIS; TEMPERATURE DISTRIBUTION; THRESHOLD VOLTAGE;

MICROMACHINING;

EID: 6344244738     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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