Laser Microfabrication of Glass Substrates by Pocket Scanning

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5063, Issue , 2003, Pages 133-136

  Lan, B ^a,b   Hong, M H ^a,b   Ye, K D ^a   Wang, Z B ^a,b   Chong, T C ^a,b  

^a DATA STORAGE INSTITUTE   (Singapore)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Ablation depth; Cracks; Glass; Laser ablation; Pocket scanning

Indexed keywords

ABLATION DEPTH; MICROFABRICATION; POCKET SCANNING;

ABLATION; BIOTECHNOLOGY; CRACKS; HARMONIC ANALYSIS; LASER ABLATION; MANUFACTURE; MICROELECTRONICS; MICROSTRUCTURE; MULTISPECTRAL SCANNERS; THERMAL EFFECTS;

GLASS;

EID: 2342566481     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.540725     Document Type: Conference Paper

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