Machining of transparent materials using an IR and UV nanosecond pulsed laser

Applied Physics A: Materials Science and Processing

Volumn 71, Issue 6, 2000, Pages 601-608

  Salleo, A ^a,b   Sands, T ^a   Genin F Y ^b  

^a Lawrence Berkeley National Laboratory   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMBUSTION; DRILLING; INFRARED RADIATION; LASER PULSES; MACHINING; PLASMA APPLICATIONS; PULSED LASER APPLICATIONS; SHOCK WAVES; TRANSPARENCY; ULTRAVIOLET RADIATION;

LASER DRILLING;

SILICA;

EID: 0034501192     PISSN: 09478396     EISSN: None     Source Type: Journal    
DOI: 10.1007/s003390000546     Document Type: Article

References (45)

1. M.A. Saifi, U.C. Paek: Amer. Ceram. Soc. Bull. 52, 838 (1973)
2. S.V. Garnov, S.M. Klimentov, T.V. Kononenko, V.I. Konov, E.N. Lubnin, F. Dausinger, A. Raiber: SPIE 2703, 442 (1996)
3. E.W. Kreutz, J. Jandeleit, R. Weichenhain, M. Sommer, A. Horn, A. Curdt: SPIE 3274, 36 (1998)
4. S. Ameer-Beg, W. Perrie, S. Rathbone, J. Wright, W. Weaver, H. Champoux: Appl. Surf. Sci. 127-129, 875 (1998)
5. R.J. Coyle, A.J. Serafino, G.J. Grimes, J.R. Bortolini: SPIE 1412, 129 (1991)
6. P.R. Herman, K. Beckley, B. Jackson, K. Kurosawa, D. Moore, T. Yamanishi, J. Yang: SPIE 2992, 86 (1997)
7. H. Hornberger, R. Weissmann, N. Lutz: Glass Sci. Technol. 69(2), 44 (1996)
8. J. Ihlemann, B. Wolff-Rottke: Appl. Surf. Sci. 86, 228 (1995)
9. K. Imen, C.H. Lee, Y.Y. Yang, S.D. Allen, A. Ghosh: Opt. Lett. 15(17), 950 (1990)
10. K. Imen, C.H. Lee, Y.Y. Yang, S.D. Allen, A. Ghosh: SPIE 1365, 60 (1991)
11. A. Vaidya, J.A. Harrington: Opt. Eng. 31(7), 1404 (1992)
12. M. Kuzumoto, Y. Takenaka, M. Tanaka, S. Takeno, M. Moriyasu, S. Hiramoto: Rev. Laser Eng. 19(9), 901 (1991)
13. M.I. Kaganov, I.M. Lifshitz, L.V. Tanatarov: Sov. Phys. JETP 4(2), 173 (1957)
14. S.I. Asinimov, B.L. Kapeliovich, T.L. Perel'man: Sov. Phys. JETP 39(2), 375 (1974)
15. B.N. Chichkov, C. Momma, S. Nolte, F. von Alvensleben, A. Tuennermann: Appl. Phys. A 63(2), 109 (1996)
16. B.C. Stuart, M.D. Feit, A.M. Rubenchik, B.W. Shore, M.D. Perry: Phys. Rev. Lett. 74(12), 2248 (1995)
17. M. von Allmen, A. Blatter: Laser-beam interactions with materials (Springer, Berlin, Heidelberg, New York 1995)
18. J.F. Ready: Effects of High-Power Laser Radiation (Academic Press, New York 1971)
19. M.D. Feit, A.M. Komashko, M.D. Perry, A.M. Rubenchik, B.C. Stuart: Technical Digest Summaries of Papers Presented at the Conference on Lasers and Electro-Optics. Conference Edition. 1998 Technical Digest Series 6, 525 (1998)
20. K. Sugioka, S. Wada, A. Tsunemi, T. Sakai, H. Takai, H. Moriwaki, A. Nakamura, H. Tashiro, K. Toyoda: Jpn. J. Appl. Phys. Pt 1 32(12B), 6185 (1993)
21. J. Ihlemann: Appl. Surf. Sci. 54, 193 (1992)
22. A. Luft, U. Franz, A. Emsermann, J. Kaspar: Appl. Phys. A: Mater. Sci. Process. 63(2), 93 (1996)
23. F. Dahmani, J.C. Lambropoulos, A.W. Schmid, S. Papemov, S.J. Burns: J. Mater. Res. 14(2), 597 (1999)
24. H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wahmer, E.E.B. Campbell: Appl. Phys. A 65(4-5), 367 (1997)
25. B. Braren, R. Srinivasan: J. Vac. Sci. Technol. B, Microelectron. Process. Phenom. 6(2), 537 (1988)
26. J. Zhang, K. Sugioka, K. Midorikawa: Appl. Phys. A 67(4), 499 (1998)
27. R. Pini, R. Salimbeni, G. Toci, M. Vannini: Opt. Quantum Electron. 27(12), 1243 (1995)
28. E.N. Glezer, E. Mazur: Appl. Phys. Lett. 71(7), 882 (1997)
29. C.B. Schaffer, E.N. Glezer, N. Nishimura, E. Mazur: SPIE 3269, 36 (1998)
30. B.Y. Zel'dovich, M.B. Strigin, A.N. Chudinov: Pis'ma Zh. Tekh. Fiz. 19(7-8), 59 (1993)
31. M. Strigin, A. Chudinov: Kvantovaya Elektron. 24(8), 787 (1994)
32. M.B. Strigin, N. Chudinov: Opt. Commun. 106(4-6), 223 (1994)
33. A. Salleo, R. Chinsio, F.Y. Génin: In Laser-Induced Damage in Optical Materials, SPIE 3578, 456 (1998)
34. S.C. Jones, P. Braunlich, R.T. Casper, S. Xiao-An, P. Kelly: Opt. Eng. 28(10), 1039 (1989)
35. L.L. Chase: Laser ablation and optical surface damage, in Laser Ablation, Springer Series in Materials Science, ed. by J.C. Miller (Springer, Berlin, Heidelberg 1994)
36. K. Yoshida, H. Yoshida, T. Kumimura, N. Kuzuu: Jpn. J. Appl. Phys. 1 37(4A), 1882 (1998)
37. Laser-Induced Damage in Optical Materials, NBS-SPIE (1969-1998)
38. N.L. Boiling, M.D. Crisp, G. Dube: Appl. Opt. 12, 650 (1973)
39. B.C. Stuart, M.D. Feit, S. Herman, A.M. Rubenchik, B.W. Shore, M.D. Perry: Phys. Rev. B 53(4), 1749 (1996)
40. F.Y. Génin, L.M. Sheehan, J. Yoshiyama, J. Dijon, P. Garrec: SPIE 3244, 155 (1998)
41. J. Ikeno, A. Kobayashi, T. Kasai: J. Jpn. Soc. Precis. Eng. 55(2), 335 (1989)
42. F. Dahmani, A.W. Schmid, J.C. Lambropoulos, S. Burns: Appl. Opt. 37(33), 7772 (1998)
43. A.A. Postnikov, M.B. Strigin, A.H. Chudinov: Pis'ma Zh. Tekh. Fiz. 20(15-16), 22 (1994)
44. A.M. Rubenchik, L.B. Da Silva, M.D. Feit, S. Lane, R. London, M.D. Perry, B.C. Stuart, J. Neev: SPIE 2672, 222 (1996)
45. 2