A fluid handling system for a chemical microanalyzer

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 95-98

  Dario, P ^b   Croce, N ^b   Carrozza, M C ^b   Varallo, G ^a  

^a ENEL   (Italy)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CHEMICAL EQUIPMENT; GROUNDWATER; HEAVY METALS; MICROANALYSIS; MICROELECTROMECHANICAL DEVICES; VALVES (MECHANICAL);

CHEMICAL MICROANALYZERS; FLUID HANDLING SYSTEMS;

PUMPS;

EID: 0030091732     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/022     Document Type: Article

References (2)

1. van den Berg A and Bergveld P 1995 Micro Total Analysis Systems (Amsterdam: Kluwer)
2. Smith R L, Bower R W, Collins SD 1990 The design and fabrication of a magnetically actuated micromachined flow valve Sensors Actuators 24 47-53