Measurement of transparent plates with wavelength-tuned phase-shifting interferometry

Applied Optics

Volumn 39, Issue 16, 2000, Pages 2658-2663

  De Groot, Peter ^a  

^a ZYGO CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; ERROR ANALYSIS; LIGHT REFLECTION; PHASE SHIFT; TRANSPARENCY;

TRANSPARENT PLATES;

INTERFEROMETRY;

EID: 0000989274     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.002658     Document Type: Article

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