메뉴 건너뛰기




Volumn 42, Issue 13, 2003, Pages 2354-2365

Fourier–transform phase–shifting interferometry

Author keywords

[No Author keywords available]

Indexed keywords

FOURIER TRANSFORMS; INTERFEROMETRY; LIGHT INTERFERENCE; LIGHT MODULATION; TUNING;

EID: 0041972181     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.42.002354     Document Type: Article
Times cited : (121)

References (18)
  • 1
    • 85010176150 scopus 로고
    • Phase shifting interferometry
    • 2nd ed., D. Malacara, ed. (Wiley, New York, Chap
    • J. E. Greivenkamp and J. H. Bruning, “Phase shifting interferometry,” in Optical Shop Testing, 2nd ed., D. Malacara, ed. (Wiley, New York, 1992), Chap. 14.
    • (1992) Optical Shop Testing , pp. 14
    • Greivenkamp, J.E.1    Bruning, J.H.2
  • 2
    • 77955701859 scopus 로고
    • Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window
    • P. de Groot, “Derivation of algorithms for phase-shifting interferometry using the concept of a data-sampling window,” Appl. Opt. 34, 4723-4730 (1995).
    • (1995) Appl. Opt. , vol.34 , pp. 4723-4730
    • De Groot, P.1
  • 3
    • 84893997835 scopus 로고
    • Design and assessment of symmetrical phase-shifting algorithms
    • K. G. Larkin and B. F. Oreb, “Design and assessment of symmetrical phase-shifting algorithms,” J. Opt. Soc. Am. A 9, 1740-1748 (1992).
    • (1992) J. Opt. Soc. Am. A , vol.9 , pp. 1740-1748
    • Larkin, K.G.1    Oreb, B.F.2
  • 4
    • 0031673690 scopus 로고    scopus 로고
    • Punctuated quadrature phase-shifting interferometry
    • L. Deck and P. de Groot, “Punctuated quadrature phase-shifting interferometry,” Opt. Lett. 23, 19-21 (1998).
    • (1998) Opt. Lett. , vol.23 , pp. 19-21
    • Deck, L.1    De Groot, P.2
  • 6
    • 0001333023 scopus 로고    scopus 로고
    • Grating interferometer for flatness testing
    • P. de Groot, “Grating interferometer for flatness testing,” Opt. Lett. 21, 228-230 (1996).
    • (1996) Opt. Lett. , vol.21 , pp. 228-230
    • De Groot, P.1
  • 9
    • 0000989274 scopus 로고    scopus 로고
    • Measurement of transparent plates with wavelength-tuned phase-shifting interferometry
    • P. de Groot, “Measurement of transparent plates with wavelength-tuned phase-shifting interferometry,” Appl. Opt. 39, 2658-2663 (2000).
    • (2000) Appl. Opt. , vol.39 , pp. 2658-2663
    • De Groot, P.1
  • 10
    • 0001615193 scopus 로고
    • Separate measurements of surface shapes and refractive index inhomogeneity of an optical element using tunable-source phase shifting interferometry
    • K. Okada, H. Sakuta, T. Ose, and J. Tsujiuchi, “Separate measurements of surface shapes and refractive index inhomogeneity of an optical element using tunable-source phase shifting interferometry,” Appl. Opt. 29, 3280-3285 (1990).
    • (1990) Appl. Opt. , vol.29 , pp. 3280-3285
    • Okada, K.1    Sakuta, H.2    Ose, T.3    Tsujiuchi, J.4
  • 11
    • 84880400781 scopus 로고
    • Wavelength-shift interferometry for distance measurements using the Fourier transform technique for fringe analysis
    • M. Suematsu and M. Takeda, “Wavelength-shift interferometry for distance measurements using the Fourier transform technique for fringe analysis,” Appl. Opt. 30, 4046-4055 (1991).
    • (1991) Appl. Opt. , vol.30 , pp. 4046-4055
    • Suematsu, M.1    Takeda, M.2
  • 13
    • 0036425815 scopus 로고    scopus 로고
    • Absolute distance measurements using FTPSI with a widely tunable IR laser
    • W. Osten, ed., Proc. SPIE 4778
    • L. Deck, “Absolute distance measurements using FTPSI with a widely tunable IR laser,” in Interferometry XI: Applications, W. Osten, ed., Proc. SPIE 4778, 218-226 (2002).
    • (2002) Interferometry XI: Applications , pp. 218-226
    • Deck, L.1
  • 14
    • 0002637533 scopus 로고    scopus 로고
    • Simultaneous multiple surface measurements using Fourier-transform phase shifting interferometry
    • W. Osten and W. Juptner, eds., (Elsevier, Paris
    • L. Deck, “Simultaneous multiple surface measurements using Fourier-transform phase shifting interferometry,” in New Methods for the Acquisition, Processing and Evaluation of Data in Optical Metrology, W. Osten and W. Juptner, eds., (Elsevier, Paris, 2001), pp. 230-236.
    • (2001) New Methods for the Acquisition, Processing and Evaluation of Data in Optical Metrology , pp. 230-236
    • Deck, L.1
  • 15
    • 0035761344 scopus 로고    scopus 로고
    • Multiple surface phase-shifting interferometry
    • H. P. Stahl, ed., Proc. SPIE 4451
    • L. Deck, “Multiple surface phase-shifting interferometry,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE 4451, 424-431 (2001).
    • (2001) Optical Manufacturing and Testing IV , pp. 424-431
    • Deck, L.1
  • 16
    • 0000002167 scopus 로고
    • Measurement of the inhomogeneity of a window
    • C. Ai and J. C. Wyant, “Measurement of the inhomogeneity of a window,” Opt. Eng. 30, 1399-1404 (1991).
    • (1991) Opt. Eng. , vol.30 , pp. 1399-1404
    • Ai, C.1    Wyant, J.C.2
  • 17
    • 0029250206 scopus 로고
    • Vibration in phase-shifting interferometry
    • P. de Groot, “Vibration in phase-shifting interferometry,” J. Opt. Soc. Am. 12, 354-365 (1995).
    • (1995) J. Opt. Soc. Am. , vol.12 , pp. 354-365
    • De Groot, P.1
  • 18
    • 0017851927 scopus 로고
    • On the use of windows for harmonic analysis with the discrete Fourier transform
    • F. J. Harris, “On the use of windows for harmonic analysis with the discrete Fourier transform,” Proc. IEEE 66, 51-83 (1978).
    • (1978) Proc. IEEE , vol.66 , pp. 51-83
    • Harris, F.J.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.