Multimode laser Fizeau interferometer for measuring the surface of a thin transparent plate

Applied Optics

Volumn 36, Issue 31, 1997, Pages 8135-8138

  Ai, Chiayu ^a  

^a WYKO Corporation   (United States)

Author keywords

Fizeau interferometer; Glass disk; Laser diode; Optical testing; Phase shift interferometry

Indexed keywords

EID: 0000098809     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.36.008135     Document Type: Article

References (10)

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