Modelling of microsystems with analog hardware description languages

Sensors and Actuators, A: Physical

Volumn 76, Issue 1-3, 1999, Pages 32-42

  Carmona, M ^a   Marco, S ^a   Sieiro, J ^a   Ruiz, O ^a   Gomez Cama J M ^a   Samitier, J ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ACTUATORS; COMPUTATIONAL GEOMETRY; COMPUTER AIDED DESIGN; COMPUTER HARDWARE DESCRIPTION LANGUAGES; COMPUTER SIMULATION; PARAMETER ESTIMATION; THREE DIMENSIONAL;

ANALOG HARDWARE DESCRIPTION LANGUAGES; MICROFLUIDS; MICROSYSTEMS; THERMAL ACTUATORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0343060850     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00024-2     Document Type: Article

References (23)

1. A. Poppe, J.M. Karam, K. Hoffmanm, M. Rencz, B. Courtois, M. Glesner, V. Szekely, A general CAD concept and design framework architecture for integrated microsystems, Microsim, Southampton, 1995, 259-265.
2. S.D. Senturia, CAD for microelectromechanical systems, Transducers'95, Stockholm, Sweden, 1995, 5-8.
3. G. Pelz, J. Bielefeld, F.-J. Zappe, G. Zimmer, MEXEL: Simulation of Microsystems in a Circuit Simulator using Automatic Electromechanical Modelling, Microsystem Technologies'94, Berlin, Germany, 1994, 651-657.
4. J. Bielefeld, G. Pelz, G. Zimmer, Comparison of electrical device representations of physical differential equations, in: R.A. Adey, A. Lahrmann, C. Lesmöllmann (Eds.), Simulation snd Design of Microsystems and Microstructures, ed. Computational Mechanics Pub., Southampton, 1995, 267-271.
5. R.L. Woods, K.L. Lawrence, Modelling and Simulation of Dynamic Systems. Prentice-Hall, Upper Saddle River, NJ, 1997.
6. S.D. Senturia, CAD challenges for Microsensors, Microactuators and Microsystems, Proceedings of the IEEE, 86, 1998, 1611-1626.
7. Marco S., Samitier J., Ruiz O., Morante J.R., Esteve J. Analysis of non-linearity in high sensitivity piezoresistive pressure sensors. Sensors and Actuators A. 37-38:1993;790-795.
8. Folkmer B., Offereins H.-L., Sandmaier H., Lang W., Groth P., Pressmar R. Simulation tool for mechanical sensor design: SENSOR. Sensors and Actuators A. 32:1992;521-524.
9. S.A. Bota, E. Montané, M. Carmona, S. Marco, J. Samitier, Parameter extraction scheme for silicon pressure sensors in standard CMOS technology, Microsim'97, Lausanne, Switzerland, 1997, 219-227.
10. S. Majer, U. Mescheder, Simulation Supported Design of Micromechanical Sensors, Microsim '95, Southampton, 1995, 329-337.
11. Suzuki K., Ishihara T., Hirata M., Tanigawa H. Nonlinear analysis of a CMOS integrated pressure sensor. IEEE Trans. Electron Devices. ED 34:1987;1360-1366.
12. Marco S., Samitier J., Ruiz O., Morante J.R., Esteve J. High performance piezoresistive sensors using very thin structured membranes. Meas. Sci. Technol. 7:1996;1195-1203.
13. Marco S., Samitier J., Ruiz O., Herms A., Mortante J.R. Analysis of electrostatic damped piezoresistive silicon accelerometers. Sensors and Actuators A. 37-38:1993;317-322.
14. Ruiz O., Rubio C., Marco S., Carmona M., Samitier J., Morante J.R. Optimization of voltage-controlled thin-film microstructures. Sensors and Actuators A. 46-47:1995;613-617.
15. T. Veijola, H. Kuisma, J. Lahdenpera, Model for Gas Damping in a Silicon Accelerometer, Transducers'97, Chicago, 1997, 1097-1100.
16. Acero M.C., Plaza J.A., Esteve J., Carmona M., Marco S., Samitier J. Design of a modular micropump based on anodic bonding. J. Micromech. Microeng. 7:1997;179-182.
17. P. Voigt G. Wachutka, Electro-fluidic microsystem modelling based on the kirchhoffian network theory, Transducers'97, Chicago, 1997, 1019-1022.
18. Zengerle R., Richter M. Simulation of microfluid systems. J. Micromech. Microeng. 4:1994;192-204.
19. Carmona M., Marco S., Samitier J., Morante J.R. Dynamic simulations of micropumps. J. Micromech. Microeng. 6:1996;128-130.
20. Ulrich J., Zengerle R. Static and dynamic flow simulation of a KOH-etched microvalve using finite element method. Sensors and Actuators A. 53:1996;379-385.
21. S. Marco, M. Carmona, J. Samitier, Extraction of Dynamic HDLA models of Thermally based microsystems from Physical Simulations, MSM98, Santa Clara, CA, 1998.
22. J.M. Kirshner, Design Theory of Fluidic Components, Academic Press, 1975.
23. F. Christiaens, Thermal Modelling and Characterization of Electronic Components, Katholieke Universiteit Leuven, Leuven, 1998.