Site-selective dye deposition onto micropatterns of fused silica fabricated with laser-induced backside wet etching (LIBWE)

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5063, Issue , 2003, Pages 118-123

  Ding, Ximing ^a   Kawaguchi, Yoshizo ^a   Sato, Tadatake ^a   Narazaki, Aiko ^a   Niino, Hiroyuki ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Excimer laser; Fused silica; Laser induced backside wet etching (LIBWE); Micro patterning; Self assembled monolayers (SAMs)

Indexed keywords

CHEMICAL BONDS; DEPOSITION; DYES; EXCIMER LASERS; FLUORESCENCE; HYDROPHILICITY; LITHOGRAPHY; MICROSCOPIC EXAMINATION; SELF ASSEMBLY;

LASER-INDUCED BACKSIDE WET ETCHING; MICRO-FLUIDIC REACTORS; MICRO-PATTERNING;

FUSED SILICA;

EID: 2342505248     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.541072     Document Type: Conference Paper

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