How do nanoislands induced by ion suputtering evolve during the early stage of growth?

Journal of Applied Physics

Volumn 96, Issue 4, 2004, Pages 2244-2248

  Xu, M ^a   Teichert, C ^b  

^a Montanuniversität Leoben ^*  (China)

^b UNIVERSITY OF LEOBEN   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; COMPUTER SIMULATION; COOLING; GALLIUM COMPOUNDS; ION BEAMS; RELAXATION PROCESSES; SPUTTERING; SUBSTRATES; SURFACE ROUGHNESS; THERMAL EFFECTS; THERMODYNAMICS;

ION SPUTTERING; ROOT MEAN SQUARE (RMS); SURFACE STRUCTURE MODULATIONS;

NANOSTRUCTURED MATERIALS;

EID: 4344680190     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1771476     Document Type: Article

References (21)

1. Y. Arakawa and H. Sakaki, Appl. Phys. Lett. 40, 939 (1982).
2. G. Schmidt and L. F. Chi, Adv. Mater. (Weinheim, Ger.) 12, 515 (1998).
3. L. Pavesi, L. Dal Negro, C. Mazzoleni, G. Franz, and F. Priolo, Nature (London) 408, 440 (2000); J. W. Lyding et al., Appl. Phys. Lett. 64, 2010 (1994); S. Hu et al., J. Vac. Sci. Technol. B 16, 2822 (1998); E. Edelberg et al., Appl. Phys. Lett. 68, 1415 (1996); G. Carter and V. Vishnyakov, Phys. Rev. B 54, 17647 (1996).
4. L. Pavesi, L. Dal Negro, C. Mazzoleni, G. Franz, and F. Priolo, Nature (London) 408, 440 (2000); J. W. Lyding et al., Appl. Phys. Lett. 64, 2010 (1994); S. Hu et al., J. Vac. Sci. Technol. B 16, 2822 (1998); E. Edelberg et al., Appl. Phys. Lett. 68, 1415 (1996); G. Carter and V. Vishnyakov, Phys. Rev. B 54, 17647 (1996).
5. L. Pavesi, L. Dal Negro, C. Mazzoleni, G. Franz, and F. Priolo, Nature (London) 408, 440 (2000); J. W. Lyding et al., Appl. Phys. Lett. 64, 2010 (1994); S. Hu et al., J. Vac. Sci. Technol. B 16, 2822 (1998); E. Edelberg et al., Appl. Phys. Lett. 68, 1415 (1996); G. Carter and V. Vishnyakov, Phys. Rev. B 54, 17647 (1996).
6. L. Pavesi, L. Dal Negro, C. Mazzoleni, G. Franz, and F. Priolo, Nature (London) 408, 440 (2000); J. W. Lyding et al., Appl. Phys. Lett. 64, 2010 (1994); S. Hu et al., J. Vac. Sci. Technol. B 16, 2822 (1998); E. Edelberg et al., Appl. Phys. Lett. 68, 1415 (1996); G. Carter and V. Vishnyakov, Phys. Rev. B 54, 17647 (1996).
7. L. Pavesi, L. Dal Negro, C. Mazzoleni, G. Franz, and F. Priolo, Nature (London) 408, 440 (2000); J. W. Lyding et al., Appl. Phys. Lett. 64, 2010 (1994); S. Hu et al., J. Vac. Sci. Technol. B 16, 2822 (1998); E. Edelberg et al., Appl. Phys. Lett. 68, 1415 (1996); G. Carter and V. Vishnyakov, Phys. Rev. B 54, 17647 (1996).
8. S. Fascko, T. Dekorsy, C. Koerdt, C. Trappe, H. Kurz, A. Vogt, and H. L. Hartnagel, Science 285, 1551 (1999).
9. R. Gago, L. Vazquez, R. Cerno, M. Varela, C. Ballesteros, and J. M. Albella, Appl. Phys. Lett. 78, 3316 (2001).
10. F. Frost, A. Schidler, and F. Bigl, Phys. Rev. Lett. 85, 4116 (2000).
11. R. Cuerno and A.-L. Barabási, Phys. Rev. Lett. 74, 4746 (1995); R. Cuerno, H. A. Makse, S. Tomassone, S. T. Harrington, and H. E. Stanley, ibid. 75, 4464 (1995).
12. R. Cuerno and A.-L. Barabási, Phys. Rev. Lett. 74, 4746 (1995); R. Cuerno, H. A. Makse, S. Tomassone, S. T. Harrington, and H. E. Stanley, ibid. 75, 4464 (1995).
13. S. Park, B. Kahng, H. Jeong, and A.-L. Barabasi, Phys. Rev. Lett. 83, 3486 (1999).
14. B. Kahng, H. Jeong, and A.-L. Barabasi, Appl. Phys. Lett. 78, 805 (2001).
15. S. Raychaudhuri, M. Cranston, C. Przybyla, and Y. Shapir, Phys. Rev. Lett. 87, 136101 (2001).
16. R. M. Bradley and J. M. E. Harper, J. Vac. Sci. Technol. A 6, 2390 (1988).
17. S. Rusponi, G. Costantini, C. Boragno, and U. Valbusa, Phys. Rev. Lett. 81, 4184 (1998).
18. S. Fascko, T. Bobek, H. Kurz, T. Dekorsy, S. Kyrsta, and R. Cremer, Appl. Phys. Lett. 80, 130 (2002).
19. H. Anderson and H. Bay, in Sputtering Bay Particle Bombardment I, edited by R. Behrisch (Springer, Berlin, 1981), p. 145.
20. T. Bobek, S. Facsko, T. Dekorsy, H. Kurz, M. Xu, and C. Teichert, Phys. Rev. B 68, 085324 (2003).
21. S. G. Mayr, M. Moske, and K. Samwer, Phys. Rev. B 60, 16950 (1999).