Microelectromechanical variable-bandwidth if frequency filters with tunable electrostatical coupling spring

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 153-156

  Galayko, Dimitri ^a   Kaiser, Andreas ^a   Buchaillot, Lionel ^a   Collard, Dominique ^b   Combi, Chantal ^c  

^a Institut Superieur de l'Electronique et du Numerique   (France)

^b UNIVERSITY OF TOKYO   (Japan)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CAPACITANCE; ELECTRIC NETWORK SYNTHESIS; ELECTRODES; ELECTROSTATICS; FREQUENCIES; MICROELECTROMECHANICAL DEVICES; RESONATORS;

CLAMPED CLAMPED BEAM RESONATORS; FILTER ARCHITECTURES; FREQUENCY FILTERS; MICROELECTROMECHANCIAL VARIABLE BANDWIDTH; TUNABLE ELECTROSTATICAL COUPLING SPRING;

BANDPASS FILTERS;

EID: 0037480728     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. A. I. Zverev, Handbook of Filter Synthesis. New York: Wiley, 1967.
2. Kun Wang, Clark T.-C. Nguyen, "High-order medium frequency micromechanical electronics filters", JMEMS, vol. 8, no. 4, december 1999.
3. Frank D. Bannon, III, John R. Clark, Clark T.-C. Nguyen, "High frequency microelectromechanical IF filters", IEEE Journal of Solid-State Circuits, Vol. 35, no. 4, april 2000.
4. D. Galayko et. al., "Design, realisation and test of micro-mechanical resonators...", to be published in JMM, Institute of Physics.
5. D. Galayko, "Filtres microélectromécaniques microusinés...", PhD dissertation, USTL (Lille, France), 2002.