Nanoscale multilayer WC/C coatings developed for nanopositioning: Part I. Microstructures and mechanical properties

Thin Solid Films

Volumn 488, Issue 1-2, 2005, Pages 132-139

  Gubisch, M ^a   Liu, Y ^a   Spiess, L ^a   Romanus, H ^a   Krischok, S ^a   Ecke, G ^a   Schaefer, J A ^a   Knedlik, Ch ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Carbon; Microstructure; Multilayers; Tungsten carbides

Indexed keywords

ATOMIC FORCE MICROSCOPY; AUGER ELECTRON SPECTROSCOPY; CARBON; CRYSTALLINE MATERIALS; GROWTH (MATERIALS); MICROSTRUCTURE; PHOTOELECTRON SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICA; SURFACE ROUGHNESS; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN CARBIDE; X RAY DIFFRACTION ANALYSIS;

CARBON COATING; NANOINDENTATION TECHNIQUES; NANOSCALE MULTILAYERS; SILICA SUBSTRATES;

NANOSTRUCTURED MATERIALS;

EID: 23144437595     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.04.107     Document Type: Article

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